AU2002327411A1 - Platen assembly having a topographically altered platen surface - Google Patents

Platen assembly having a topographically altered platen surface

Info

Publication number
AU2002327411A1
AU2002327411A1 AU2002327411A AU2002327411A AU2002327411A1 AU 2002327411 A1 AU2002327411 A1 AU 2002327411A1 AU 2002327411 A AU2002327411 A AU 2002327411A AU 2002327411 A AU2002327411 A AU 2002327411A AU 2002327411 A1 AU2002327411 A1 AU 2002327411A1
Authority
AU
Australia
Prior art keywords
platen
assembly
topographically
altered
topographically altered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002327411A
Inventor
Kevin T. Crofton
Travis R. Taylor
Cangshan Xu
Eugene Yuexing Zhao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lam Research Corp
Original Assignee
Lam Research Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Research Corp filed Critical Lam Research Corp
Publication of AU2002327411A1 publication Critical patent/AU2002327411A1/en
Abandoned legal-status Critical Current

Links

AU2002327411A 2001-08-08 2002-07-31 Platen assembly having a topographically altered platen surface Abandoned AU2002327411A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/925,254 2001-08-08

Publications (1)

Publication Number Publication Date
AU2002327411A1 true AU2002327411A1 (en) 2003-02-24

Family

ID=

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