AU2002324483A1 - Method of forming low resistance vias - Google Patents

Method of forming low resistance vias

Info

Publication number
AU2002324483A1
AU2002324483A1 AU2002324483A AU2002324483A AU2002324483A1 AU 2002324483 A1 AU2002324483 A1 AU 2002324483A1 AU 2002324483 A AU2002324483 A AU 2002324483A AU 2002324483 A AU2002324483 A AU 2002324483A AU 2002324483 A1 AU2002324483 A1 AU 2002324483A1
Authority
AU
Australia
Prior art keywords
low resistance
forming low
resistance vias
vias
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002324483A
Inventor
Drawn Hopper
Robert A. Huertas
Minh Van Ngo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Micro Devices Inc
Original Assignee
Advanced Micro Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Micro Devices Inc filed Critical Advanced Micro Devices Inc
Publication of AU2002324483A1 publication Critical patent/AU2002324483A1/en
Abandoned legal-status Critical Current

Links

AU2002324483A 2001-05-02 2002-01-31 Method of forming low resistance vias Abandoned AU2002324483A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/846,187 2001-05-02

Publications (1)

Publication Number Publication Date
AU2002324483A1 true AU2002324483A1 (en) 2003-01-02

Family

ID=

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