AU2002324238A1 - Detection of metals in semiconductor wafers - Google Patents

Detection of metals in semiconductor wafers

Info

Publication number
AU2002324238A1
AU2002324238A1 AU2002324238A AU2002324238A AU2002324238A1 AU 2002324238 A1 AU2002324238 A1 AU 2002324238A1 AU 2002324238 A AU2002324238 A AU 2002324238A AU 2002324238 A AU2002324238 A AU 2002324238A AU 2002324238 A1 AU2002324238 A1 AU 2002324238A1
Authority
AU
Australia
Prior art keywords
metals
detection
semiconductor wafers
wafers
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002324238A
Inventor
Gary Lewis Jones
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pure Wafer Ltd
Original Assignee
Pure Wafer Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pure Wafer Ltd filed Critical Pure Wafer Ltd
Publication of AU2002324238A1 publication Critical patent/AU2002324238A1/en
Abandoned legal-status Critical Current

Links

AU2002324238A 2001-09-24 2002-09-19 Detection of metals in semiconductor wafers Abandoned AU2002324238A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0122932.7 2001-09-24

Publications (1)

Publication Number Publication Date
AU2002324238A1 true AU2002324238A1 (en) 2003-04-07

Family

ID=

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