AU2002319045A1 - Method and apparatus for depth profile analysis by laser induced plasma spectroscopy - Google Patents

Method and apparatus for depth profile analysis by laser induced plasma spectroscopy

Info

Publication number
AU2002319045A1
AU2002319045A1 AU2002319045A AU2002319045A AU2002319045A1 AU 2002319045 A1 AU2002319045 A1 AU 2002319045A1 AU 2002319045 A AU2002319045 A AU 2002319045A AU 2002319045 A AU2002319045 A AU 2002319045A AU 2002319045 A1 AU2002319045 A1 AU 2002319045A1
Authority
AU
Australia
Prior art keywords
depth profile
laser induced
profile analysis
induced plasma
plasma spectroscopy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002319045A
Inventor
Vincent Detalle
Mohamad Sabsabi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Research Council of Canada
Original Assignee
National Research Council of Canada
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Research Council of Canada filed Critical National Research Council of Canada
Publication of AU2002319045A1 publication Critical patent/AU2002319045A1/en
Abandoned legal-status Critical Current

Links

AU2002319045A 2001-07-12 2002-07-12 Method and apparatus for depth profile analysis by laser induced plasma spectroscopy Abandoned AU2002319045A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA2,353,014 2001-07-12

Publications (1)

Publication Number Publication Date
AU2002319045A1 true AU2002319045A1 (en) 2003-01-29

Family

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