AU2002318651A1 - Projection optical system production method - Google Patents

Projection optical system production method

Info

Publication number
AU2002318651A1
AU2002318651A1 AU2002318651A AU2002318651A AU2002318651A1 AU 2002318651 A1 AU2002318651 A1 AU 2002318651A1 AU 2002318651 A AU2002318651 A AU 2002318651A AU 2002318651 A AU2002318651 A AU 2002318651A AU 2002318651 A1 AU2002318651 A1 AU 2002318651A1
Authority
AU
Australia
Prior art keywords
optical system
production method
projection optical
system production
projection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002318651A
Inventor
Youhei Fujishima
Hironori Ikezawa
Yasuhiro Omura
Toshihiko Ozawa
Takeshi Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of AU2002318651A1 publication Critical patent/AU2002318651A1/en
Abandoned legal-status Critical Current

Links

AU2002318651A 2001-07-10 2002-07-10 Projection optical system production method Abandoned AU2002318651A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001-208837 2001-07-10
JP2001-257809 2001-08-28

Publications (1)

Publication Number Publication Date
AU2002318651A1 true AU2002318651A1 (en) 2003-01-29

Family

ID=

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