AU2002315688A1 - Chemical vapor deposition (cvd) installation and method for producing preforms - Google Patents

Chemical vapor deposition (cvd) installation and method for producing preforms

Info

Publication number
AU2002315688A1
AU2002315688A1 AU2002315688A AU2002315688A AU2002315688A1 AU 2002315688 A1 AU2002315688 A1 AU 2002315688A1 AU 2002315688 A AU2002315688 A AU 2002315688A AU 2002315688 A AU2002315688 A AU 2002315688A AU 2002315688 A1 AU2002315688 A1 AU 2002315688A1
Authority
AU
Australia
Prior art keywords
cvd
installation
vapor deposition
chemical vapor
producing preforms
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002315688A
Inventor
Manfred Wittmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
S AND S TECHNOLOGIE- und INVESTITIONSGESELLSCHAFT MBH
Original Assignee
S AND S TECHNOLOGIE und INVEST
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by S AND S TECHNOLOGIE und INVEST filed Critical S AND S TECHNOLOGIE und INVEST
Publication of AU2002315688A1 publication Critical patent/AU2002315688A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
    • C03B37/01807—Reactant delivery systems, e.g. reactant deposition burners
    • C03B37/01815—Reactant deposition burners or deposition heating means
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
    • C03B37/01884—Means for supporting, rotating and translating tubes or rods being formed, e.g. lathes
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/20—Doped silica-based glasses doped with non-metals other than boron or fluorine
    • C03B2201/28—Doped silica-based glasses doped with non-metals other than boron or fluorine doped with phosphorus
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
    • C03B2201/31—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with germanium

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
AU2002315688A 2002-05-21 2002-05-21 Chemical vapor deposition (cvd) installation and method for producing preforms Abandoned AU2002315688A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/DE2002/001812 WO2003097542A1 (en) 2002-05-21 2002-05-21 Chemical vapor deposition (cvd) installation and method for producing preforms

Publications (1)

Publication Number Publication Date
AU2002315688A1 true AU2002315688A1 (en) 2003-12-02

Family

ID=29430785

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002315688A Abandoned AU2002315688A1 (en) 2002-05-21 2002-05-21 Chemical vapor deposition (cvd) installation and method for producing preforms

Country Status (3)

Country Link
AU (1) AU2002315688A1 (en)
DE (1) DE10297773D2 (en)
WO (1) WO2003097542A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL2004874C2 (en) 2010-06-11 2011-12-19 Draka Comteq Bv METHOD FOR MANUFACTURING A PRIMARY FORM

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4909816A (en) * 1974-02-22 1990-03-20 American Telephone And Telegraph Company, At&T Bell Laboratories Optical fiber fabrication and resulting product
US4317667A (en) * 1981-01-05 1982-03-02 Western Electric Co., Inc. Method and apparatus for fabricating lightguide preforms
US4528009A (en) * 1983-06-01 1985-07-09 Corning Glass Works Method of forming optical fiber having laminated core
JPH05221670A (en) * 1992-02-14 1993-08-31 Furukawa Electric Co Ltd:The Method for depositing fine quartz-based glass particle

Also Published As

Publication number Publication date
DE10297773D2 (en) 2005-04-21
WO2003097542A1 (en) 2003-11-27

Similar Documents

Publication Publication Date Title
AU2003259147A1 (en) Continuous chemical vapor deposition process and process furnace
EP1630250A4 (en) Chemical vapor deposition film formed by plasma cvd process and method for forming same
AU2002343583A1 (en) Chemical vapor deposition system
EP1308537A3 (en) System and method for preferential chemical vapor deposition
HK1060214A1 (en) Process for catalytic chemical vapor deposition ofsilicon nitride
EP1440179A4 (en) Chemical vapor deposition system
AU2002346665A1 (en) Chemical vapor deposition vaporizer
AU2002221138A1 (en) Vacuum carbo-nitriding method
AU2003242146A1 (en) Method of storing hydrogen, hydrogen inclusion compound and process for producing the same
AU3394400A (en) Chemical vapor deposition system and method
GB2400613B (en) Plasma deposition method
EP1557872A4 (en) Plasma chemical vapor deposition method and plasma chemical vapor deposition device
IL133765A0 (en) Method of producing nns articles by chemical vapor deposition
AU2002340316A1 (en) Plasma chemical vapor deposition methods and apparatus
AU2003235218A1 (en) Process for producing firing-denatured tenmoku tile, firing-denatured tenmoku tile and glaze
AU4325000A (en) Method of hot-filament chemical vapor deposition of diamond
AU2002315688A1 (en) Chemical vapor deposition (cvd) installation and method for producing preforms
AU2003275278A8 (en) Composition and chemical vapor deposition method for forming organic low k dielectric films
AU2003257716A1 (en) Method and apparatus for manufacturing optical fiber preforms, using the outside vapor deposition process
AU2002353021A1 (en) Chemical vapor deposition reactor
AU2002249829A1 (en) Chemical vapor deposition devices and methods
AU2003212761A1 (en) A substrate structure, a method and an arrangement for producing such substrate structure
AU2001255358A1 (en) Methods for chemical vapor deposition of titanium-silicon-nitrogen films
AU2003233581A1 (en) Method of depositing an oxide film by chemical vapor deposition
AU2003255391A1 (en) Mechanical deposition process

Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase