AU2002315628A1 - Method and device for the generation of far ultraviolet or soft x-ray radiation - Google Patents

Method and device for the generation of far ultraviolet or soft x-ray radiation

Info

Publication number
AU2002315628A1
AU2002315628A1 AU2002315628A AU2002315628A AU2002315628A1 AU 2002315628 A1 AU2002315628 A1 AU 2002315628A1 AU 2002315628 A AU2002315628 A AU 2002315628A AU 2002315628 A AU2002315628 A AU 2002315628A AU 2002315628 A1 AU2002315628 A1 AU 2002315628A1
Authority
AU
Australia
Prior art keywords
soft
generation
ray radiation
far ultraviolet
ultraviolet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002315628A
Inventor
Klaus Bergmann
Willi Neff
Joseph Pankert
Oliver Rosier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Publication of AU2002315628A1 publication Critical patent/AU2002315628A1/en
Abandoned legal-status Critical Current

Links

AU2002315628A 2001-04-06 2002-03-21 Method and device for the generation of far ultraviolet or soft x-ray radiation Abandoned AU2002315628A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10117378.4 2001-04-06
DE10134033.8 2001-07-12

Publications (1)

Publication Number Publication Date
AU2002315628A1 true AU2002315628A1 (en) 2002-10-21

Family

ID=

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110113855A (en) * 2018-02-01 2019-08-09 三星电子株式会社 EUV generation device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110113855A (en) * 2018-02-01 2019-08-09 三星电子株式会社 EUV generation device
CN110113855B (en) * 2018-02-01 2024-04-09 三星电子株式会社 EUV generating device

Similar Documents

Publication Publication Date Title
AU2003264266A1 (en) Method and device for producing extreme ultraviolet radiation or soft x-ray radiation
AU1454100A (en) Shaped source of soft x-ray, extreme ultraviolet and ultraviolet radiation
AU2001238126A1 (en) Apparatus for local radiation therapy
AU2002253574A1 (en) Exposure method and apparatus
WO2003042728A8 (en) Achromatic fresnel optics for ultraviolet and x-ray radiation
AU2001234152A1 (en) X-ray imaging device and method of manufacture thereof
AU2001249980A1 (en) Apparatus for local radiation therapy
AU2002363514A1 (en) Irradiation apparatus and method
AU2003296726A1 (en) Method and device for radiographic imaging
AU2002351087A1 (en) X-ray examination apparatus and method
EP1406693A4 (en) Radiation application method and device
AU2003262256A1 (en) X-ray generator and exposure device
AU2002365557A1 (en) Method and apparatus for radiographic imaging
AU2001236783A1 (en) Apparatus for local radiation therapy
AU2002218162A1 (en) Radiation source and irradiation device
AU2003242477A1 (en) Optical unit and x-ray exposure system
AU7489500A (en) Apparatus and method for generating ultraviolet radiation
AU2002346991A1 (en) Method and a device for the combination of a first and second beam of rays
EP1450689A4 (en) Film interpretation apparatus for medical treatment
AU2002315628A1 (en) Method and device for the generation of far ultraviolet or soft x-ray radiation
AU2002302317A1 (en) Method and device for producing extreme ultraviolet radiation and soft x-radiation
AU2003248107A1 (en) X-ray generating device and exposure device
AU2001244001A1 (en) Methods and devices for radiation therapy
AU2002302424A1 (en) Method and device for generating euv radiation
AU2002251364A1 (en) Method and apparatus for x-ray laminography