Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002313813A
Inventor
Sowmya Krishnan
Matthew Milburn
Mohamed Saleem
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ultra Clean Technology Systems and Services Inc
Original Assignee
Ultra Clean Technology Systems and Services Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ultra Clean Technology Systems and Services IncfiledCriticalUltra Clean Technology Systems and Services Inc
Publication of AU2002313813A1publicationCriticalpatent/AU2002313813A1/en