AU2002313813A1 - Catalytic reactor apparatus and method for generating high purity water vapor - Google Patents

Catalytic reactor apparatus and method for generating high purity water vapor

Info

Publication number
AU2002313813A1
AU2002313813A1 AU2002313813A AU2002313813A AU2002313813A1 AU 2002313813 A1 AU2002313813 A1 AU 2002313813A1 AU 2002313813 A AU2002313813 A AU 2002313813A AU 2002313813 A AU2002313813 A AU 2002313813A AU 2002313813 A1 AU2002313813 A1 AU 2002313813A1
Authority
AU
Australia
Prior art keywords
water vapor
high purity
catalytic reactor
generating high
purity water
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002313813A
Inventor
Sowmya Krishnan
Matthew Milburn
Mohamed Saleem
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ultra Clean Technology Systems and Services Inc
Original Assignee
Ultra Clean Technology Systems and Services Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ultra Clean Technology Systems and Services Inc filed Critical Ultra Clean Technology Systems and Services Inc
Publication of AU2002313813A1 publication Critical patent/AU2002313813A1/en
Abandoned legal-status Critical Current

Links

AU2002313813A 2001-08-13 2002-08-13 Catalytic reactor apparatus and method for generating high purity water vapor Abandoned AU2002313813A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US60/311,887 2001-08-13

Publications (1)

Publication Number Publication Date
AU2002313813A1 true AU2002313813A1 (en) 2003-03-03

Family

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