AU2002311154A1 - Dry-etching method - Google Patents

Dry-etching method

Info

Publication number
AU2002311154A1
AU2002311154A1 AU2002311154A AU2002311154A AU2002311154A1 AU 2002311154 A1 AU2002311154 A1 AU 2002311154A1 AU 2002311154 A AU2002311154 A AU 2002311154A AU 2002311154 A AU2002311154 A AU 2002311154A AU 2002311154 A1 AU2002311154 A1 AU 2002311154A1
Authority
AU
Australia
Prior art keywords
dry
etching method
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002311154A
Inventor
Ethuo Iijima
Meiki Koh
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of AU2002311154A1 publication Critical patent/AU2002311154A1/en
Abandoned legal-status Critical Current

Links

AU2002311154A 2001-06-22 2002-06-07 Dry-etching method Abandoned AU2002311154A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001-189579 2001-06-22
JP2002-12206 2002-01-21

Publications (1)

Publication Number Publication Date
AU2002311154A1 true AU2002311154A1 (en) 2003-01-08

Family

ID=

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