AU2002307391A1 - Gas discharge laser with improved beam path - Google Patents

Gas discharge laser with improved beam path

Info

Publication number
AU2002307391A1
AU2002307391A1 AU2002307391A AU2002307391A AU2002307391A1 AU 2002307391 A1 AU2002307391 A1 AU 2002307391A1 AU 2002307391 A AU2002307391 A AU 2002307391A AU 2002307391 A AU2002307391 A AU 2002307391A AU 2002307391 A1 AU2002307391 A1 AU 2002307391A1
Authority
AU
Australia
Prior art keywords
gas discharge
beam path
discharge laser
improved beam
improved
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002307391A
Inventor
Ray F. Cybulski
Holger K. Glatzel
James K. Howey
William Hulburd
Alex P. Ivaschenko
John T. Melchior
Peter C. Newman
William N. Partlo
Richard L. Sandstrom
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cymer Inc
Original Assignee
Cymer Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cymer Inc filed Critical Cymer Inc
Publication of AU2002307391A1 publication Critical patent/AU2002307391A1/en
Abandoned legal-status Critical Current

Links

AU2002307391A 2001-05-11 2002-04-17 Gas discharge laser with improved beam path Abandoned AU2002307391A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/854,097 2001-05-11
US10/000,991 2001-11-14

Publications (1)

Publication Number Publication Date
AU2002307391A1 true AU2002307391A1 (en) 2002-11-25

Family

ID=

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