AU2002307274A1 - Anti-reflective coating and methods of making the same - Google Patents

Anti-reflective coating and methods of making the same

Info

Publication number
AU2002307274A1
AU2002307274A1 AU2002307274A AU2002307274A AU2002307274A1 AU 2002307274 A1 AU2002307274 A1 AU 2002307274A1 AU 2002307274 A AU2002307274 A AU 2002307274A AU 2002307274 A AU2002307274 A AU 2002307274A AU 2002307274 A1 AU2002307274 A1 AU 2002307274A1
Authority
AU
Australia
Prior art keywords
making
methods
same
reflective coating
reflective
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002307274A
Inventor
David E. Brown
Kin-Sang Lam
Sey-Ping Sun
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Micro Devices Inc
Original Assignee
Advanced Micro Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Micro Devices Inc filed Critical Advanced Micro Devices Inc
Publication of AU2002307274A1 publication Critical patent/AU2002307274A1/en
Abandoned legal-status Critical Current

Links

AU2002307274A 2001-06-06 2002-04-11 Anti-reflective coating and methods of making the same Abandoned AU2002307274A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/875,681 2001-06-06

Publications (1)

Publication Number Publication Date
AU2002307274A1 true AU2002307274A1 (en) 2002-12-16

Family

ID=

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