AU2002304723A1 - Device and method for controlling focussed electron beams - Google Patents

Device and method for controlling focussed electron beams

Info

Publication number
AU2002304723A1
AU2002304723A1 AU2002304723A AU2002304723A AU2002304723A1 AU 2002304723 A1 AU2002304723 A1 AU 2002304723A1 AU 2002304723 A AU2002304723 A AU 2002304723A AU 2002304723 A AU2002304723 A AU 2002304723A AU 2002304723 A1 AU2002304723 A1 AU 2002304723A1
Authority
AU
Australia
Prior art keywords
controlling
electron beams
focussed electron
focussed
beams
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002304723A
Inventor
Pavel Adamec
Dieter Winkler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ICT Integrated Circuit Testing Gesellschaft fuer Halbleiterprueftechnik mbH
Original Assignee
ICT Integrated Circuit Testing Gesellschaft fuer Halbleiterprueftechnik mbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ICT Integrated Circuit Testing Gesellschaft fuer Halbleiterprueftechnik mbH filed Critical ICT Integrated Circuit Testing Gesellschaft fuer Halbleiterprueftechnik mbH
Publication of AU2002304723A1 publication Critical patent/AU2002304723A1/en
Abandoned legal-status Critical Current

Links

AU2002304723A 2001-04-09 2002-04-08 Device and method for controlling focussed electron beams Abandoned AU2002304723A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP01108868.9 2001-04-09

Publications (1)

Publication Number Publication Date
AU2002304723A1 true AU2002304723A1 (en) 2002-10-21

Family

ID=

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