AU2002251666A1 - Micromachined torsional mirror unit for optical switching and fabrication method therefor - Google Patents

Micromachined torsional mirror unit for optical switching and fabrication method therefor

Info

Publication number
AU2002251666A1
AU2002251666A1 AU2002251666A AU2002251666A AU2002251666A1 AU 2002251666 A1 AU2002251666 A1 AU 2002251666A1 AU 2002251666 A AU2002251666 A AU 2002251666A AU 2002251666 A AU2002251666 A AU 2002251666A AU 2002251666 A1 AU2002251666 A1 AU 2002251666A1
Authority
AU
Australia
Prior art keywords
method therefor
fabrication method
mirror unit
optical switching
torsional mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002251666A
Other versions
AU2002251666A8 (en
Inventor
Nicolaas F. De Rooij
Wilfried Noell
Xuechuan Shan
Zhenfeng Wang
Zhiping Wang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Universite de Neuchatel
Singapore Institute of Manufacturing Technology
Original Assignee
Singapore Institute of Manufacturing Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Singapore Institute of Manufacturing Technology filed Critical Singapore Institute of Manufacturing Technology
Publication of AU2002251666A1 publication Critical patent/AU2002251666A1/en
Publication of AU2002251666A8 publication Critical patent/AU2002251666A8/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0054—For holding or placing an element in a given position
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/033—Comb drives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/045—Optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/056—Rotation in a plane parallel to the substrate
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/358—Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
AU2002251666A 2002-03-30 2002-03-30 Micromachined torsional mirror unit for optical switching and fabrication method therefor Abandoned AU2002251666A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/SG2002/000051 WO2003086954A1 (en) 2002-03-30 2002-03-30 Micromachined torsional mirror unit for optical switching and fabrication method therefor

Publications (2)

Publication Number Publication Date
AU2002251666A1 true AU2002251666A1 (en) 2003-10-27
AU2002251666A8 AU2002251666A8 (en) 2003-10-27

Family

ID=29247022

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002251666A Abandoned AU2002251666A1 (en) 2002-03-30 2002-03-30 Micromachined torsional mirror unit for optical switching and fabrication method therefor

Country Status (2)

Country Link
AU (1) AU2002251666A1 (en)
WO (1) WO2003086954A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1398766A3 (en) * 2002-08-13 2005-08-17 Lg Electronics Inc. Micro-actuator, manufacturing method thereof, optical pickup head of optical recording/reproducing apparatus with micro-actuator and fabrication method thereof
EP1591824B1 (en) * 2004-04-26 2012-05-09 Panasonic Corporation Microactuator
CN109734044B (en) * 2019-01-09 2021-08-24 杭州电子科技大学 Self-driven miniature impact hammer
CN109761185B (en) * 2019-01-25 2020-09-29 山东大学 MEMS driver based on zipper comb teeth and working method thereof
CN111943127B (en) * 2020-07-10 2024-01-05 瑞声科技（南京）有限公司 Comb tooth structure, preparation method thereof and microphone

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6301403B1 (en) * 1996-07-30 2001-10-09 Iolon, Inc. Optical microswitch with rotary electrostatic microactuator
GB0020427D0 (en) * 2000-08-18 2000-10-04 Kymata Ltd Moem device and fabrication method

Also Published As

Publication number Publication date
AU2002251666A8 (en) 2003-10-27
WO2003086954A1 (en) 2003-10-23

Similar Documents

Publication Publication Date Title
EP1368614B8 (en) Laser mirror vision
AU2002253630A1 (en) Spectacle lens designing method and spectacle lens
AU2003210792A1 (en) Fast steering mirror
AU6263501A (en) Wavefront method for designing optical elements
AU2002361359A1 (en) Remouvable eyewear member
AU2003260960A1 (en) Optical path switching device and method
AU2002305654A1 (en) Focusing mirrors having variable reflective properties
AU2003294125A1 (en) Deformable mirror
AU2002306898A1 (en) Optical device and method therefor
AU2002361916A1 (en) Iris-supported intraocular lenses
AU2003217067A1 (en) Optical controls
AU2003248585A1 (en) Mirrors for polymer waveguides
AU2003278245A1 (en) Optical microsystem and method for making same
AU2002332452A1 (en) Mems mirror
AU2002251666A1 (en) Micromachined torsional mirror unit for optical switching and fabrication method therefor
AU2003264933A1 (en) Optical micro-actuator
AU2003272817A1 (en) Eyecup for glasses
AU2003256956A1 (en) Optical switch arrangement and method
AU2002321977A1 (en) Optical crossconnect and mirror system
AU2002352798A1 (en) UV OPTICAL FLUORIDE CRYSTAL ELEMENTS FOR LamdaLESS THAN200NM LASER LITHOGRAPHY AND METHODS THEREFORE
AU2003235773A1 (en) Monolithic optical control components
AU2003281628A1 (en) Glass capable of being machined by laser
AU2002233138A1 (en) An eyeglass framework
AU2002313317A1 (en) Rimless spectacles part
AU2001280213A1 (en) Ocular lens

Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase
TH Corrigenda

Free format text: IN VOL 17, NO 48, PAGE(S) 16572 UNDER THE HEADING APPLICATIONS OPI - NAME INDEX UNDER THE NAME SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY, APPLICATION NO. 2002251666, UNDER INID (71) CORRECT THE NAME TO READ SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY; UNIVERSITY OF NEUCHATEL