AU2002250922A1 - Metal pattern formation - Google Patents

Metal pattern formation

Info

Publication number
AU2002250922A1
AU2002250922A1 AU2002250922A AU2002250922A AU2002250922A1 AU 2002250922 A1 AU2002250922 A1 AU 2002250922A1 AU 2002250922 A AU2002250922 A AU 2002250922A AU 2002250922 A AU2002250922 A AU 2002250922A AU 2002250922 A1 AU2002250922 A1 AU 2002250922A1
Authority
AU
Australia
Prior art keywords
metal pattern
pattern formation
formation
metal
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002250922A
Inventor
Udo Grieser
Heinrich Meyer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Atotech Deutschland GmbH and Co KG
Original Assignee
Atotech Deutschland GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Atotech Deutschland GmbH and Co KG filed Critical Atotech Deutschland GmbH and Co KG
Publication of AU2002250922A1 publication Critical patent/AU2002250922A1/en
Abandoned legal-status Critical Current

Links

AU2002250922A 2001-03-07 2002-02-12 Metal pattern formation Abandoned AU2002250922A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE10112023.0 2001-03-07

Publications (1)

Publication Number Publication Date
AU2002250922A1 true AU2002250922A1 (en) 2002-09-19

Family

ID=

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