AU2002245525A1 - Lithographic template - Google Patents

Lithographic template

Info

Publication number
AU2002245525A1
AU2002245525A1 AU2002245525A AU2002245525A AU2002245525A1 AU 2002245525 A1 AU2002245525 A1 AU 2002245525A1 AU 2002245525 A AU2002245525 A AU 2002245525A AU 2002245525 A AU2002245525 A AU 2002245525A AU 2002245525 A1 AU2002245525 A1 AU 2002245525A1
Authority
AU
Australia
Prior art keywords
lithographic template
lithographic
template
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002245525A
Inventor
Kevin J. Nordquist
Doug J. Resnick
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Motorola Solutions Inc
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Publication of AU2002245525A1 publication Critical patent/AU2002245525A1/en
Abandoned legal-status Critical Current

Links

AU2002245525A 2001-03-28 2002-02-27 Lithographic template Abandoned AU2002245525A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/819,388 2001-03-28

Publications (1)

Publication Number Publication Date
AU2002245525A1 true AU2002245525A1 (en) 2002-10-15

Family

ID=

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