AU2002244135A1 - Phase-shift-moire focus monitor - Google Patents

Phase-shift-moire focus monitor

Info

Publication number
AU2002244135A1
AU2002244135A1 AU2002244135A AU2002244135A AU2002244135A1 AU 2002244135 A1 AU2002244135 A1 AU 2002244135A1 AU 2002244135 A AU2002244135 A AU 2002244135A AU 2002244135 A AU2002244135 A AU 2002244135A AU 2002244135 A1 AU2002244135 A1 AU 2002244135A1
Authority
AU
Australia
Prior art keywords
moire
shift
phase
focus monitor
focus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002244135A
Inventor
Jongwook Kye
Bruno Lafontaine
Harry Levinson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Micro Devices Inc
Original Assignee
Advanced Micro Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Micro Devices Inc filed Critical Advanced Micro Devices Inc
Publication of AU2002244135A1 publication Critical patent/AU2002244135A1/en
Abandoned legal-status Critical Current

Links

AU2002244135A 2001-08-31 2002-02-22 Phase-shift-moire focus monitor Abandoned AU2002244135A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/944,794 2001-08-31

Publications (1)

Publication Number Publication Date
AU2002244135A1 true AU2002244135A1 (en) 2003-03-18

Family

ID=

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