AU2002243625A1 - Mems capacitive sensor for physiologic parameter measurement - Google Patents

Mems capacitive sensor for physiologic parameter measurement

Info

Publication number
AU2002243625A1
AU2002243625A1 AU2002243625A AU2002243625A AU2002243625A1 AU 2002243625 A1 AU2002243625 A1 AU 2002243625A1 AU 2002243625 A AU2002243625 A AU 2002243625A AU 2002243625 A AU2002243625 A AU 2002243625A AU 2002243625 A1 AU2002243625 A1 AU 2002243625A1
Authority
AU
Australia
Prior art keywords
capacitive sensor
parameter measurement
physiologic parameter
mems capacitive
mems
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002243625A
Inventor
Nadar Najafi
Collin A. Rich
Yafan Zhang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Integrated Sensing Systems Inc
Original Assignee
Integrated Sensing Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Integrated Sensing Systems Inc filed Critical Integrated Sensing Systems Inc
Publication of AU2002243625A1 publication Critical patent/AU2002243625A1/en
Abandoned legal-status Critical Current

Links

AU2002243625A 2001-01-22 2002-01-22 Mems capacitive sensor for physiologic parameter measurement Abandoned AU2002243625A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US60/263,327 2001-01-22
US60/278,634 2001-03-26

Publications (1)

Publication Number Publication Date
AU2002243625A1 true AU2002243625A1 (en) 2002-07-30

Family

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