AU2002242925A1 - High temperature micro-hotplate - Google Patents

High temperature micro-hotplate

Info

Publication number
AU2002242925A1
AU2002242925A1 AU2002242925A AU2002242925A AU2002242925A1 AU 2002242925 A1 AU2002242925 A1 AU 2002242925A1 AU 2002242925 A AU2002242925 A AU 2002242925A AU 2002242925 A AU2002242925 A AU 2002242925A AU 2002242925 A1 AU2002242925 A1 AU 2002242925A1
Authority
AU
Australia
Prior art keywords
hotplate
high temperature
temperature micro
micro
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002242925A
Inventor
Jacek Baborowski
Nicolas Ledermann
Paul Muralt
Arnaud Pollien
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ecole Polytechnique Federale de Lausanne EPFL
Original Assignee
Ecole Polytechnique Federale de Lausanne EPFL
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ecole Polytechnique Federale de Lausanne EPFL filed Critical Ecole Polytechnique Federale de Lausanne EPFL
Publication of AU2002242925A1 publication Critical patent/AU2002242925A1/en
Abandoned legal-status Critical Current

Links

AU2002242925A 2001-03-28 2002-03-28 High temperature micro-hotplate Abandoned AU2002242925A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP01810314.3 2001-03-28
EP01810675.7 2001-07-09

Publications (1)

Publication Number Publication Date
AU2002242925A1 true AU2002242925A1 (en) 2002-10-15

Family

ID=

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