AU2002241929A1 - Fused silica pellicle - Google Patents

Fused silica pellicle

Info

Publication number
AU2002241929A1
AU2002241929A1 AU2002241929A AU2002241929A AU2002241929A1 AU 2002241929 A1 AU2002241929 A1 AU 2002241929A1 AU 2002241929 A AU2002241929 A AU 2002241929A AU 2002241929 A AU2002241929 A AU 2002241929A AU 2002241929 A1 AU2002241929 A1 AU 2002241929A1
Authority
AU
Australia
Prior art keywords
fused silica
silica pellicle
pellicle
fused
silica
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002241929A
Inventor
Ben Eynon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Photronics Inc
Original Assignee
Photronics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Photronics Inc filed Critical Photronics Inc
Publication of AU2002241929A1 publication Critical patent/AU2002241929A1/en
Abandoned legal-status Critical Current

Links

AU2002241929A 2001-01-22 2002-01-18 Fused silica pellicle Abandoned AU2002241929A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/766,907 2001-01-22

Publications (1)

Publication Number Publication Date
AU2002241929A1 true AU2002241929A1 (en) 2002-07-30

Family

ID=

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