AU2002241650A1 - Soi devices with integrated gettering structure - Google Patents

Soi devices with integrated gettering structure

Info

Publication number
AU2002241650A1
AU2002241650A1 AU2002241650A AU2002241650A AU2002241650A1 AU 2002241650 A1 AU2002241650 A1 AU 2002241650A1 AU 2002241650 A AU2002241650 A AU 2002241650A AU 2002241650 A AU2002241650 A AU 2002241650A AU 2002241650 A1 AU2002241650 A1 AU 2002241650A1
Authority
AU
Australia
Prior art keywords
integrated
soi devices
gettering structure
gettering
soi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002241650A
Inventor
Jeffrey P. Gambino
Jerome B. Lasky
Jack A. Mandelman
Carl J. Radens
Steven H. Voldman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of AU2002241650A1 publication Critical patent/AU2002241650A1/en
Abandoned legal-status Critical Current

Links

AU2002241650A 2001-03-30 2001-12-19 Soi devices with integrated gettering structure Abandoned AU2002241650A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/822,431 2001-03-30

Publications (1)

Publication Number Publication Date
AU2002241650A1 true AU2002241650A1 (en) 2002-10-15

Family

ID=

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