AU2002241084A1 - Control of deposition and other processes - Google Patents

Control of deposition and other processes

Info

Publication number
AU2002241084A1
AU2002241084A1 AU2002241084A AU2002241084A AU2002241084A1 AU 2002241084 A1 AU2002241084 A1 AU 2002241084A1 AU 2002241084 A AU2002241084 A AU 2002241084A AU 2002241084 A AU2002241084 A AU 2002241084A AU 2002241084 A1 AU2002241084 A1 AU 2002241084A1
Authority
AU
Australia
Prior art keywords
deposition
processes
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002241084A
Inventor
Stephen Richard Duncan
Patrick Grant
Paul Jones
Timothy Rayment
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oxford University Innovation Ltd
Original Assignee
Oxford University Innovation Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oxford University Innovation Ltd filed Critical Oxford University Innovation Ltd
Publication of AU2002241084A1 publication Critical patent/AU2002241084A1/en
Abandoned legal-status Critical Current

Links

AU2002241084A 2001-03-05 2002-03-05 Control of deposition and other processes Abandoned AU2002241084A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0105411.3 2001-03-05

Publications (1)

Publication Number Publication Date
AU2002241084A1 true AU2002241084A1 (en) 2002-09-19

Family

ID=

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