AU2002239522A1 - Apparatuses and methods for resistively heating a thermal processing system - Google Patents
Apparatuses and methods for resistively heating a thermal processing systemInfo
- Publication number
- AU2002239522A1 AU2002239522A1 AU2002239522A AU3952202A AU2002239522A1 AU 2002239522 A1 AU2002239522 A1 AU 2002239522A1 AU 2002239522 A AU2002239522 A AU 2002239522A AU 3952202 A AU3952202 A AU 3952202A AU 2002239522 A1 AU2002239522 A1 AU 2002239522A1
- Authority
- AU
- Australia
- Prior art keywords
- apparatuses
- methods
- processing system
- thermal processing
- resistively heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67103—Apparatus for thermal treatment mainly by conduction
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Resistance Heating (AREA)
- Tunnel Furnaces (AREA)
- Furnace Details (AREA)
- Surface Heating Bodies (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US24970800P | 2000-11-16 | 2000-11-16 | |
US60/249,708 | 2000-11-16 | ||
PCT/US2001/046633 WO2002041370A2 (en) | 2000-11-16 | 2001-11-07 | Apparatuses and methods for resistively heating a thermal processing system |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2002239522A1 true AU2002239522A1 (en) | 2002-05-27 |
Family
ID=22944641
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2002239522A Abandoned AU2002239522A1 (en) | 2000-11-16 | 2001-11-07 | Apparatuses and methods for resistively heating a thermal processing system |
Country Status (8)
Country | Link |
---|---|
US (1) | US7176417B2 (en) |
JP (1) | JP2004514287A (en) |
KR (1) | KR100847367B1 (en) |
CN (1) | CN1299322C (en) |
AU (1) | AU2002239522A1 (en) |
DE (1) | DE10196908T1 (en) |
TW (1) | TW518907B (en) |
WO (1) | WO2002041370A2 (en) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19956767A1 (en) * | 1999-11-25 | 2001-05-31 | Nanogate Gmbh | Silicon carbide ceramic heating element for igniting combustible mixture has negative temperature characteristic in circuit with segment whose resistance saturates quasi-asymptotically |
JP2005348820A (en) * | 2004-06-08 | 2005-12-22 | Olympus Corp | Heating element, medical treatment tool and apparatus using thereof |
US7326877B2 (en) * | 2004-12-01 | 2008-02-05 | Ultratech, Inc. | Laser thermal processing chuck with a thermal compensating heater module |
US7378781B2 (en) * | 2005-09-07 | 2008-05-27 | Nokia Corporation | Acoustic wave resonator with integrated temperature control for oscillator purposes |
US20070128563A1 (en) * | 2005-12-07 | 2007-06-07 | Kanakasabapathi Subramanian | Ignition device for a gas appliance and method of operation |
US7785482B2 (en) * | 2005-12-07 | 2010-08-31 | General Electric Company | Method of making an ignition device |
US7741584B2 (en) * | 2007-01-21 | 2010-06-22 | Momentive Performance Materials Inc. | Encapsulated graphite heater and process |
US20110062145A1 (en) * | 2007-09-10 | 2011-03-17 | Amo Co., Ltd. | Drying heater, heating unit for drying laundry using the same, drying control system and control method thereof |
KR101031226B1 (en) * | 2009-08-21 | 2011-04-29 | 에이피시스템 주식회사 | Heater block of rapid thermal processing apparatus |
US10138551B2 (en) | 2010-07-29 | 2018-11-27 | GES Associates LLC | Substrate processing apparatuses and systems |
CN104105229B (en) * | 2013-04-07 | 2016-02-24 | 光宝科技股份有限公司 | Heating unit and apply the heating system of this heating unit |
EP2842738B1 (en) * | 2013-08-26 | 2020-06-24 | FCT Ingenieurkeramik GmbH | Method of producing a ceramic heating element |
KR101673016B1 (en) * | 2013-08-27 | 2016-11-07 | 삼성디스플레이 주식회사 | Thin film encapsulation manufacturing device and manufacturing method of display apparatus using the same |
WO2015192105A1 (en) * | 2014-06-12 | 2015-12-17 | Crystal Solar, Inc. | Cvd epitaxial reactor chamber with resistive heating, three channel substrate carrier and gas preheat structure |
US10154542B2 (en) | 2015-10-19 | 2018-12-11 | Watlow Electric Manufacturing Company | Composite device with cylindrical anisotropic thermal conductivity |
CN106777675B (en) * | 2016-12-14 | 2019-09-20 | 北京航天益森风洞工程技术有限公司 | The hot relevant parameter design method of graphite resistance heater |
US11665786B2 (en) * | 2019-12-05 | 2023-05-30 | Applied Materials, Inc. | Solid state heater and method of manufacture |
CN116963326A (en) * | 2023-08-02 | 2023-10-27 | 南通通杰照明有限公司 | Ceramic heater and glow plug |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH597681A5 (en) * | 1975-09-05 | 1978-04-14 | Sulzer Ag | |
US4328529A (en) * | 1977-09-12 | 1982-05-04 | Emerson Electric Co. | Silicon carbide igniters |
US4433233A (en) * | 1979-09-27 | 1984-02-21 | Emerson Electric Co. | Silicon carbide heating elements |
US4862029A (en) * | 1987-02-11 | 1989-08-29 | Tosoh Corporation | Actuator |
EP0447155B1 (en) * | 1990-03-12 | 1995-07-26 | Ngk Insulators, Ltd. | Wafer heaters for use in semi-conductor-producing apparatus, heating units using such wafer heaters, and production of heaters |
JP2585123B2 (en) * | 1990-04-13 | 1997-02-26 | 東芝セラミックス株式会社 | Method for producing silicon single crystal |
JPH07307377A (en) * | 1993-12-27 | 1995-11-21 | Shin Etsu Chem Co Ltd | Ceramic heater with electrostatic chuck |
CN1076863C (en) * | 1994-06-10 | 2001-12-26 | 松下电器产业株式会社 | Apparatus and method of manufacturing semiconductor element |
US5502345A (en) * | 1994-08-29 | 1996-03-26 | The United States Of America As Represented By The Secretary Of The Navy | Unitary transducer with variable resistivity |
US6108189A (en) * | 1996-04-26 | 2000-08-22 | Applied Materials, Inc. | Electrostatic chuck having improved gas conduits |
US5748434A (en) * | 1996-06-14 | 1998-05-05 | Applied Materials, Inc. | Shield for an electrostatic chuck |
US5994662A (en) * | 1997-05-29 | 1999-11-30 | Applied Materials, Inc. | Unique baffle to deflect remote plasma clean gases |
US5909355A (en) * | 1997-12-02 | 1999-06-01 | Applied Materials, Inc. | Ceramic electrostatic chuck and method of fabricating same |
DE19836989A1 (en) * | 1998-08-14 | 2000-02-24 | Bosch Gmbh Robert | Production of ceramic powder used for finishing planar ceramic sensor elements comprises adding additive to prevent gas inclusions in powder product during thermal treatment |
US6329741B1 (en) * | 1999-04-30 | 2001-12-11 | The Trustees Of Princeton University | Multilayer ceramic piezoelectric laminates with zinc oxide conductors |
US6423949B1 (en) * | 1999-05-19 | 2002-07-23 | Applied Materials, Inc. | Multi-zone resistive heater |
JP4028149B2 (en) * | 2000-02-03 | 2007-12-26 | 日本碍子株式会社 | Heating device |
JP4605729B2 (en) * | 2001-01-19 | 2011-01-05 | 信越石英株式会社 | Translucent ceramic body and method for producing the same |
-
2001
- 2001-11-07 AU AU2002239522A patent/AU2002239522A1/en not_active Abandoned
- 2001-11-07 KR KR1020037006714A patent/KR100847367B1/en not_active IP Right Cessation
- 2001-11-07 CN CNB018190731A patent/CN1299322C/en not_active Expired - Fee Related
- 2001-11-07 WO PCT/US2001/046633 patent/WO2002041370A2/en active Application Filing
- 2001-11-07 DE DE10196908T patent/DE10196908T1/en not_active Ceased
- 2001-11-07 JP JP2002543680A patent/JP2004514287A/en active Pending
- 2001-11-12 TW TW090128028A patent/TW518907B/en not_active IP Right Cessation
- 2001-11-15 US US09/998,801 patent/US7176417B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US20020100753A1 (en) | 2002-08-01 |
CN1475026A (en) | 2004-02-11 |
JP2004514287A (en) | 2004-05-13 |
DE10196908T1 (en) | 2003-10-09 |
KR100847367B1 (en) | 2008-07-21 |
KR20030074620A (en) | 2003-09-19 |
CN1299322C (en) | 2007-02-07 |
WO2002041370A2 (en) | 2002-05-23 |
US7176417B2 (en) | 2007-02-13 |
WO2002041370A3 (en) | 2003-02-20 |
TW518907B (en) | 2003-01-21 |
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