AU2002236219A1 - Temperature measuring method and apparatus and semiconductor heat treatment apparatus - Google Patents

Temperature measuring method and apparatus and semiconductor heat treatment apparatus

Info

Publication number
AU2002236219A1
AU2002236219A1 AU2002236219A AU2002236219A AU2002236219A1 AU 2002236219 A1 AU2002236219 A1 AU 2002236219A1 AU 2002236219 A AU2002236219 A AU 2002236219A AU 2002236219 A AU2002236219 A AU 2002236219A AU 2002236219 A1 AU2002236219 A1 AU 2002236219A1
Authority
AU
Australia
Prior art keywords
heat treatment
measuring method
temperature measuring
semiconductor heat
treatment apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002236219A
Inventor
Tomohiro Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of AU2002236219A1 publication Critical patent/AU2002236219A1/en
Abandoned legal-status Critical Current

Links

AU2002236219A 2001-03-06 2002-03-05 Temperature measuring method and apparatus and semiconductor heat treatment apparatus Abandoned AU2002236219A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001-062600 2001-03-06

Publications (1)

Publication Number Publication Date
AU2002236219A1 true AU2002236219A1 (en) 2002-10-03

Family

ID=

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