AU2002228977A1 - Hybrid low-k interconnect structure comprised of 2 spin-on dielectric materials - Google Patents

Hybrid low-k interconnect structure comprised of 2 spin-on dielectric materials

Info

Publication number
AU2002228977A1
AU2002228977A1 AU2002228977A AU2002228977A AU2002228977A1 AU 2002228977 A1 AU2002228977 A1 AU 2002228977A1 AU 2002228977 A AU2002228977 A AU 2002228977A AU 2002228977 A AU2002228977 A AU 2002228977A AU 2002228977 A1 AU2002228977 A1 AU 2002228977A1
Authority
AU
Australia
Prior art keywords
spin
interconnect structure
dielectric materials
structure comprised
hybrid low
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002228977A
Inventor
Stephen Mcconnell Gates
Jeffrey Curtis Hedrick
Satyanarayana V. Nitta
Sampath Purushothaman
Christy Sensenich Tyberg
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of AU2002228977A1 publication Critical patent/AU2002228977A1/en
Abandoned legal-status Critical Current

Links

AU2002228977A 2001-02-28 2001-12-10 Hybrid low-k interconnect structure comprised of 2 spin-on dielectric materials Abandoned AU2002228977A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/795,429 2001-02-28

Publications (1)

Publication Number Publication Date
AU2002228977A1 true AU2002228977A1 (en) 2002-09-19

Family

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