AU2002227969A1 - Method for producing a fluid component, fluid component and an analysis device - Google Patents

Method for producing a fluid component, fluid component and an analysis device

Info

Publication number
AU2002227969A1
AU2002227969A1 AU2002227969A AU2796902A AU2002227969A1 AU 2002227969 A1 AU2002227969 A1 AU 2002227969A1 AU 2002227969 A AU2002227969 A AU 2002227969A AU 2796902 A AU2796902 A AU 2796902A AU 2002227969 A1 AU2002227969 A1 AU 2002227969A1
Authority
AU
Australia
Prior art keywords
fluid component
wafer
capillary
producing
oxide layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002227969A
Inventor
Johannes Frech
Martin Muller
Peter Nommensen
Cord-F. Stahler
Tilo Strobelt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Febit AG
Original Assignee
Hann-Schickard-Gesellschaft fuer Angewandte Forschung eV
Febit AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hann-Schickard-Gesellschaft fuer Angewandte Forschung eV, Febit AG filed Critical Hann-Schickard-Gesellschaft fuer Angewandte Forschung eV
Publication of AU2002227969A1 publication Critical patent/AU2002227969A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B1/00—Devices without movable or flexible elements, e.g. microcapillary devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00119—Arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00349—Creating layers of material on a substrate
    • B81C1/00357—Creating layers of material on a substrate involving bonding one or several substrates on a non-temporary support, e.g. another substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/12—Specific details about manufacturing devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/05—Microfluidics
    • B81B2201/058—Microfluidics not provided for in B81B2201/051 - B81B2201/054
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0323—Grooves
    • B81B2203/0338—Channels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
    • B81C2201/019—Bonding or gluing multiple substrate layers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00—Chemistry: analytical and immunological testing
    • Y10T436/11—Automated chemical analysis
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00—Chemistry: analytical and immunological testing
    • Y10T436/25—Chemistry: analytical and immunological testing including sample preparation
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00—Chemistry: analytical and immunological testing
    • Y10T436/25—Chemistry: analytical and immunological testing including sample preparation
    • Y10T436/2575—Volumetric liquid transfer

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Health & Medical Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Hematology (AREA)
  • Clinical Laboratory Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Micromachines (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
  • Lubricants (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Optical Measuring Cells (AREA)

Abstract

Capillary manufacture where a silicon layer (14) formed on a wafer (10) through an oxide layer (12), defines active height of a capillary path (16) and is patterned by dry etching, using the oxide layer as an etch stop, is new. A glass wafer (20) is adhered on the patterned layer by anodic bonding. The wafer (10) and the oxide layer are etched and removed. Another glass wafer is bonded to the silicon layer surface that is exposed by etching. Independent claims are also included for the following: (1) capillary; and (2) analyzer.
AU2002227969A 2000-12-05 2001-11-30 Method for producing a fluid component, fluid component and an analysis device Abandoned AU2002227969A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10060433A DE10060433B4 (en) 2000-12-05 2000-12-05 Method for producing a fluid component, fluid component and analysis device
DE10060433.1 2000-12-05
PCT/EP2001/014036 WO2002046091A2 (en) 2000-12-05 2001-11-30 Method for producing a fluid component, fluid component and an analysis device

Publications (1)

Publication Number Publication Date
AU2002227969A1 true AU2002227969A1 (en) 2002-06-18

Family

ID=7665876

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002227969A Abandoned AU2002227969A1 (en) 2000-12-05 2001-11-30 Method for producing a fluid component, fluid component and an analysis device

Country Status (6)

Country Link
US (1) US7226862B2 (en)
EP (2) EP1369380B1 (en)
AT (2) ATE283234T1 (en)
AU (1) AU2002227969A1 (en)
DE (3) DE10060433B4 (en)
WO (1) WO2002046091A2 (en)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005340655A (en) * 2004-05-28 2005-12-08 Shinko Electric Ind Co Ltd Method for manufacturing semiconductor device, and structure for supporting semiconductor substrate
DE102006032047A1 (en) * 2006-07-10 2008-01-24 Schott Ag Optoelectronic component e.g. image signal-detecting component, manufacturing method for e.g. digital fixed image camera, involves positioning components either one by one or in groups relative to position of associated components of wafer
DE102006062089A1 (en) 2006-12-29 2008-07-03 Febit Holding Gmbh Molecular biology process system comprises a device for synthesis of receptor arrays, devices for performing fluidic steps, a detection unit and programmable control units
DE102007018833A1 (en) 2007-04-20 2008-10-23 Febit Holding Gmbh Molecular-biological processing unit for detection, analysis of genomes, for producing e.g. synthetic nucleic acids, comprises device for in-situ-synthesis of arrays of receptors
JP5159247B2 (en) * 2007-10-26 2013-03-06 キヤノン株式会社 Detection method and detection apparatus
DE102012112989A1 (en) * 2012-12-21 2014-06-26 Ev Group E. Thallner Gmbh Method for applying a temporary boundary layer
EP3722442B1 (en) 2013-08-05 2023-04-05 Twist Bioscience Corporation De novo synthesized gene libraries
US9714933B2 (en) 2014-01-28 2017-07-25 International Business Machines Corporation Micro-droplet fluidic cell for fast ionic current detection using nanopores
WO2016126987A1 (en) 2015-02-04 2016-08-11 Twist Bioscience Corporation Compositions and methods for synthetic gene assembly
US10669304B2 (en) 2015-02-04 2020-06-02 Twist Bioscience Corporation Methods and devices for de novo oligonucleic acid assembly
WO2016172377A1 (en) 2015-04-21 2016-10-27 Twist Bioscience Corporation Devices and methods for oligonucleic acid library synthesis
IL258164B (en) 2015-09-18 2022-09-01 Twist Bioscience Corp Methods for modulating protein and cellular activity and method for nucleic acid synthesis
KR20180058772A (en) 2015-09-22 2018-06-01 트위스트 바이오사이언스 코포레이션 Flexible substrate for nucleic acid synthesis
US9895673B2 (en) 2015-12-01 2018-02-20 Twist Bioscience Corporation Functionalized surfaces and preparation thereof
CA3034769A1 (en) 2016-08-22 2018-03-01 Twist Bioscience Corporation De novo synthesized nucleic acid libraries
KR102217487B1 (en) 2016-09-21 2021-02-23 트위스트 바이오사이언스 코포레이션 Nucleic acid-based data storage
CN110366613A (en) 2016-12-16 2019-10-22 特韦斯特生物科学公司 The Mutant libraries of immunological synapse and its synthesis
CA3054303A1 (en) 2017-02-22 2018-08-30 Twist Bioscience Corporation Nucleic acid based data storage
AU2018234629A1 (en) 2017-03-15 2019-10-17 Twist Bioscience Corporation Variant libraries of the immunological synapse and synthesis thereof
KR20240013290A (en) 2017-06-12 2024-01-30 트위스트 바이오사이언스 코포레이션 Methods for seamless nucleic acid assembly
WO2018231864A1 (en) 2017-06-12 2018-12-20 Twist Bioscience Corporation Methods for seamless nucleic acid assembly
CA3075505A1 (en) 2017-09-11 2019-03-14 Twist Bioscience Corporation Gpcr binding proteins and synthesis thereof
JP7066840B2 (en) 2017-10-20 2022-05-13 ツイスト バイオサイエンス コーポレーション Heated nanowells for polynucleotide synthesis
SG11202006460SA (en) 2018-01-04 2020-08-28 Twist Bioscience Corp Dna-based digital information storage
WO2019222706A1 (en) 2018-05-18 2019-11-21 Twist Bioscience Corporation Polynucleotides, reagents, and methods for nucleic acid hybridization
WO2020176680A1 (en) 2019-02-26 2020-09-03 Twist Bioscience Corporation Variant nucleic acid libraries for antibody optimization
AU2020229349A1 (en) 2019-02-26 2021-10-14 Twist Bioscience Corporation Variant nucleic acid libraries for GLP1 receptor
AU2020298294A1 (en) 2019-06-21 2022-02-17 Twist Bioscience Corporation Barcode-based nucleic acid sequence assembly

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5498392A (en) 1992-05-01 1996-03-12 Trustees Of The University Of Pennsylvania Mesoscale polynucleotide amplification device and method
US5744366A (en) 1992-05-01 1998-04-28 Trustees Of The University Of Pennsylvania Mesoscale devices and methods for analysis of motile cells
WO1996041864A1 (en) 1995-06-13 1996-12-27 The Regents Of The University Of California Diode laser heated micro-reaction chamber with sample detection means
US5783452A (en) * 1996-02-02 1998-07-21 University Of Washington Covered microchannels and the microfabrication thereof
US6153076A (en) * 1998-01-12 2000-11-28 The Regents Of The University Of California Extended length microchannels for high density high throughput electrophoresis systems
US6251343B1 (en) * 1998-02-24 2001-06-26 Caliper Technologies Corp. Microfluidic devices and systems incorporating cover layers
US6454840B1 (en) * 1998-08-20 2002-09-24 Siemens Aktiengesellschaft Separation-column unit for a gas-chromatograph and method for making the same
JP2002523781A (en) * 1998-08-28 2002-07-30 フェビット フェラリウス バイオテクノロジー ゲゼルシャフト ミット ベシュレンクテル ハフツング Method and apparatus for the production and / or production of a biochemical reaction support

Also Published As

Publication number Publication date
EP1369380B1 (en) 2006-08-23
US20020068021A1 (en) 2002-06-06
EP1355848A2 (en) 2003-10-29
ATE337265T1 (en) 2006-09-15
WO2002046091A3 (en) 2003-07-31
DE10060433A1 (en) 2002-06-13
EP1369380A3 (en) 2004-03-24
WO2002046091A2 (en) 2002-06-13
DE50104638D1 (en) 2004-12-30
DE10060433B4 (en) 2006-05-11
EP1355848B1 (en) 2004-11-24
DE50110834D1 (en) 2006-10-05
EP1369380A2 (en) 2003-12-10
ATE283234T1 (en) 2004-12-15
US7226862B2 (en) 2007-06-05

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