AU2002226343A1 - Method for producing highly pure, granular silicon - Google Patents

Method for producing highly pure, granular silicon

Info

Publication number
AU2002226343A1
AU2002226343A1 AU2002226343A AU2634302A AU2002226343A1 AU 2002226343 A1 AU2002226343 A1 AU 2002226343A1 AU 2002226343 A AU2002226343 A AU 2002226343A AU 2634302 A AU2634302 A AU 2634302A AU 2002226343 A1 AU2002226343 A1 AU 2002226343A1
Authority
AU
Australia
Prior art keywords
silicon
highly pure
producing highly
granular silicon
granular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002226343A
Inventor
Sigurd Buchholz
Maria Pilar Tejero Ezpeleta
Leslaw Mleczko
Oliver Felix-Karl Schluter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SolarWorld AG
Original Assignee
SolarWorld AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SolarWorld AG filed Critical SolarWorld AG
Publication of AU2002226343A1 publication Critical patent/AU2002226343A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C01B33/029—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition of monosilane
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/547—Monocrystalline silicon PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Silicon Compounds (AREA)

Abstract

The invention relates to a method for producing highly pure, granular silicon by decomposing a gas containing silicon in a procedure comprising at least two operating states, at least one state comprising the increased formation of nucleus particles from the decomposition of said gas containing silicon and at least one other state comprising the increased separation of the silicon with expansion of the diameter of the silicon granules. The invention also relates to the use of silicon produced in this way and to highly pure, granular silicon particles which are characterised by a coreless structure.
AU2002226343A 2000-12-14 2001-11-21 Method for producing highly pure, granular silicon Abandoned AU2002226343A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10062419A DE10062419A1 (en) 2000-12-14 2000-12-14 Process for the production of high-purity, granular silicon
DE10062419.7 2000-12-14
PCT/EP2001/013505 WO2002048033A1 (en) 2000-12-14 2001-11-21 Method for producing highly pure, granular silicon

Publications (1)

Publication Number Publication Date
AU2002226343A1 true AU2002226343A1 (en) 2002-06-24

Family

ID=7667193

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002226343A Abandoned AU2002226343A1 (en) 2000-12-14 2001-11-21 Method for producing highly pure, granular silicon

Country Status (6)

Country Link
US (1) US6953559B2 (en)
EP (1) EP1343722B1 (en)
AT (1) ATE274470T1 (en)
AU (1) AU2002226343A1 (en)
DE (2) DE10062419A1 (en)
WO (1) WO2002048033A1 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011516290A (en) * 2008-04-11 2011-05-26 イオシル エナジー コーポレイション Method and apparatus for recovery of silicon and silicon carbide from spent wafer sawing slurry
CN103787336B (en) 2008-09-16 2016-09-14 储晞 The method producing high purity granular silicon
DE102008059408A1 (en) 2008-11-27 2010-06-02 Schmid Silicon Technology Gmbh Process and apparatus for the production of ultrapure silicon
US8168123B2 (en) * 2009-02-26 2012-05-01 Siliken Chemicals, S.L. Fluidized bed reactor for production of high purity silicon
TW201113391A (en) * 2009-03-19 2011-04-16 Ae Polysilicon Corp Silicide-coated metal surfaces and methods of utilizing same
CA2759449A1 (en) * 2009-04-20 2010-10-28 Ae Polysilicon Corporation Processes and an apparatus for manufacturing high purity polysilicon
TWI454309B (en) 2009-04-20 2014-10-01 Jiangsu Zhongneng Polysilicon Technology Dev Co Ltd Methods and system for cooling a reaction effluent gas
TWI498165B (en) * 2009-04-20 2015-09-01 Jiangsu Zhongneng Polysilicon Technology Dev Co Ltd A reactor with silicide-coated metal surfaces
KR20100117025A (en) * 2009-04-23 2010-11-02 스미또모 가가꾸 가부시키가이샤 Process for producing photoresist pattern
US8875728B2 (en) 2012-07-12 2014-11-04 Siliken Chemicals, S.L. Cooled gas distribution plate, thermal bridge breaking system, and related methods

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3012861A (en) * 1960-01-15 1961-12-12 Du Pont Production of silicon
US4207360A (en) * 1975-10-31 1980-06-10 Texas Instruments Incorporated Silicon seed production process
US4444811A (en) * 1980-03-03 1984-04-24 California Institute Of Technology Fluidized bed silicon deposition from silane
US4784840A (en) * 1986-08-25 1988-11-15 Ethyl Corporation Polysilicon fluid bed process and product
US5139762A (en) * 1987-12-14 1992-08-18 Advanced Silicon Materials, Inc. Fluidized bed for production of polycrystalline silicon
DE3811091A1 (en) * 1988-03-31 1989-10-12 Heliotronic Gmbh METHOD FOR COMMANDING LOW CONTAMINATION OF SOLID, PIECE OF SILICONE
DE19727441A1 (en) * 1997-06-27 1999-01-07 Wacker Chemie Gmbh Device and method for comminuting semiconductor material
DE50004819D1 (en) 1999-10-11 2004-01-29 Solarworld Ag METHOD FOR PRODUCING HIGH PURITY, GRANULAR SILICON AT LOW PRESSURE

Also Published As

Publication number Publication date
US6953559B2 (en) 2005-10-11
US20040047796A1 (en) 2004-03-11
WO2002048033A8 (en) 2003-01-09
EP1343722A1 (en) 2003-09-17
WO2002048033A1 (en) 2002-06-20
EP1343722B1 (en) 2004-08-25
ATE274470T1 (en) 2004-09-15
DE50103427D1 (en) 2004-09-30
DE10062419A1 (en) 2002-08-01

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