AU2002225638A1 - Strain-isolated stage mirror by at least a flexural hinge - Google Patents

Strain-isolated stage mirror by at least a flexural hinge

Info

Publication number
AU2002225638A1
AU2002225638A1 AU2002225638A AU2563802A AU2002225638A1 AU 2002225638 A1 AU2002225638 A1 AU 2002225638A1 AU 2002225638 A AU2002225638 A AU 2002225638A AU 2563802 A AU2563802 A AU 2563802A AU 2002225638 A1 AU2002225638 A1 AU 2002225638A1
Authority
AU
Australia
Prior art keywords
strain
isolated stage
stage mirror
flexural hinge
flexural
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002225638A
Inventor
Peter B. Mumola
Steven R. Patterson
Flemming Tinker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zygo Corp
Original Assignee
Zygo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zygo Corp filed Critical Zygo Corp
Publication of AU2002225638A1 publication Critical patent/AU2002225638A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
AU2002225638A 2000-11-20 2001-11-19 Strain-isolated stage mirror by at least a flexural hinge Abandoned AU2002225638A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US24994700P 2000-11-20 2000-11-20
US60249947 2000-11-20
US10002408 2001-11-15
US10/002,408 US6646779B2 (en) 2000-11-20 2001-11-15 Strain-isolated stage mirror
PCT/US2001/043220 WO2002042823A1 (en) 2000-11-20 2001-11-19 Strain-isolated stage mirror by at least a flexural hinge

Publications (1)

Publication Number Publication Date
AU2002225638A1 true AU2002225638A1 (en) 2002-06-03

Family

ID=26670336

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002225638A Abandoned AU2002225638A1 (en) 2000-11-20 2001-11-19 Strain-isolated stage mirror by at least a flexural hinge

Country Status (3)

Country Link
US (1) US6646779B2 (en)
AU (1) AU2002225638A1 (en)
WO (1) WO2002042823A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7417714B2 (en) * 2004-11-02 2008-08-26 Nikon Corporation Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stage
US7869000B2 (en) * 2004-11-02 2011-01-11 Nikon Corporation Stage assembly with lightweight fine stage and low transmissibility
DE102009045163B4 (en) 2009-09-30 2017-04-06 Carl Zeiss Smt Gmbh Optical arrangement in a microlithographic projection exposure apparatus
CN105283789A (en) 2013-02-13 2016-01-27 齐戈股份有限公司 Monolithic optical components with integrated flexures
CN103995340B (en) * 2014-05-05 2016-03-02 中国科学院长春光学精密机械与物理研究所 A kind of refracting prisms flexible support structure working in low temperature environment

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4421381A (en) * 1980-04-04 1983-12-20 Yokogawa Hokushin Electric Corp. Mechanical vibrating element
HU199023B (en) * 1987-02-12 1989-12-28 Gyula Eisler Adjuster for adjusting angular position of optical elements
US4997158A (en) 1989-11-27 1991-03-05 The United States Of America As Represented By The Administrator, Of The National Aeronautics And Space Administration Mechanical strain isolator mount
DE4226027A1 (en) 1992-08-06 1994-02-10 Arnold & Richter Kg Optical system support e.g. for light-valve, laser diode, sensor, three-face or Fresnel mirror or prism - contains adjustable mounting or holder provided by triple-screw set and elastic member
US5798879A (en) 1995-06-07 1998-08-25 Salvio; Paul R. Stress-free, adjustable optical support
DE29603024U1 (en) 1996-02-21 1996-04-18 Fa. Carl Zeiss, 89518 Heidenheim Stress-free storage
US5877905A (en) 1997-04-14 1999-03-02 Schwartz; Richard A. Mount for telescope mirrors

Also Published As

Publication number Publication date
US6646779B2 (en) 2003-11-11
US20020085262A1 (en) 2002-07-04
WO2002042823A1 (en) 2002-05-30

Similar Documents

Publication Publication Date Title
AU2001238087A1 (en) Exterior mirror
AU2001234936A1 (en) Modular bios update mechanism
AU2001281208A1 (en) Hinge assembly for a truss
AUPQ837500A0 (en) A mounting
AU2002225638A1 (en) Strain-isolated stage mirror by at least a flexural hinge
AU3199201A (en) Optical components
AU2001258432A1 (en) Z-crank mechanism
AU2245601A (en) Positioning hinge
AU6748400A (en) A single-compiler architecture
AU2002366300A1 (en) A phantom
AU2001277461A1 (en) Hinge
AU2002349721A1 (en) A toilet
AU2002227959A1 (en) Hinge for eyeglasses
AU2002352450A1 (en) A mould
AU2002359571A1 (en) A softening-through-the-wash composition
AU2001252821A1 (en) A sawweb arrangement for fungus-control
AU3198600A (en) Capo
AUPQ547700A0 (en) A hinge
AU2002329166A1 (en) A hinge
AUPR409501A0 (en) A hinge
AU2002301555A1 (en) A frame member
AUPP929799A0 (en) A novel molecule
AU2002334098A1 (en) Hinge mechanism
AUPR575201A0 (en) A linkage mechanism
AUPQ849600A0 (en) A dead-lockable mechanism