AU2002225171A1 - Electrostatic chuck - Google Patents

Electrostatic chuck

Info

Publication number
AU2002225171A1
AU2002225171A1 AU2002225171A AU2002225171A AU2002225171A1 AU 2002225171 A1 AU2002225171 A1 AU 2002225171A1 AU 2002225171 A AU2002225171 A AU 2002225171A AU 2002225171 A AU2002225171 A AU 2002225171A AU 2002225171 A1 AU2002225171 A1 AU 2002225171A1
Authority
AU
Australia
Prior art keywords
electrostatic chuck
chuck
electrostatic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002225171A
Inventor
Matthew Peter Martin
David Andrew Tossell
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aviza Europe Ltd
Original Assignee
Aviza Europe Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aviza Europe Ltd filed Critical Aviza Europe Ltd
Publication of AU2002225171A1 publication Critical patent/AU2002225171A1/en
Abandoned legal-status Critical Current

Links

AU2002225171A 2001-02-22 2002-01-18 Electrostatic chuck Abandoned AU2002225171A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0104341.3 2001-02-22

Publications (1)

Publication Number Publication Date
AU2002225171A1 true AU2002225171A1 (en) 2002-09-12

Family

ID=

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