AU2002225171A1 - Electrostatic chuck - Google Patents

Electrostatic chuck

Info

Publication number
AU2002225171A1
AU2002225171A1 AU2002225171A AU2002225171A AU2002225171A1 AU 2002225171 A1 AU2002225171 A1 AU 2002225171A1 AU 2002225171 A AU2002225171 A AU 2002225171A AU 2002225171 A AU2002225171 A AU 2002225171A AU 2002225171 A1 AU2002225171 A1 AU 2002225171A1
Authority
AU
Australia
Prior art keywords
electrostatic chuck
chuck
electrostatic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002225171A
Inventor
Matthew Peter Martin
David Andrew Tossell
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aviza Europe Ltd
Original Assignee
Aviza Europe Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aviza Europe Ltd filed Critical Aviza Europe Ltd
Publication of AU2002225171A1 publication Critical patent/AU2002225171A1/en
Abandoned legal-status Critical Current

Links

AU2002225171A 2001-02-22 2002-01-18 Electrostatic chuck Abandoned AU2002225171A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0104341.3 2001-02-22

Publications (1)

Publication Number Publication Date
AU2002225171A1 true AU2002225171A1 (en) 2002-09-12

Family

ID=

Similar Documents

Publication Publication Date Title
EP1211725A4 (en) Electrostatic chuck
AU2002300898A1 (en) Slaphammer tool
AU2002245172A1 (en) An electrostatic dust-filtering device
AU2002313565A1 (en) Putter-heads
EP1577937A4 (en) Electrostatic chuck
AU2002220882A1 (en) Electrostatic clamping
AU2002319532A1 (en) Feeding-bottles
AU2002313943A1 (en) Electromobile
AU2002226571A1 (en) Biligands
AU2002225171A1 (en) Electrostatic chuck
AU2001100406A4 (en) DriverSMS
AU2002313073A1 (en) Phytocystatin
AU2002216350A1 (en) Chuck
AU2002345730A1 (en) Chuck
AU2002315623A1 (en) Hammerlock chuck
AU2002257925A1 (en) Numberplates
AU2001100214A4 (en) Dolly-trolley
AU2001100522A4 (en) e-Trans
AU2002100746A4 (en) Adrail
AU2001100338A4 (en) Sunglove
AU2001100532A4 (en) FonePark
AUPR429601A0 (en) Drawing aid
EP1267554A1 (en) GSM-Telephone Adapter
AU2002313543A1 (en) Workpiece forming
AUPR243601A0 (en) Improvements