AU2002218378A1 - Method and device for high-speed interferential microscopic imaging of an object - Google Patents

Method and device for high-speed interferential microscopic imaging of an object

Info

Publication number
AU2002218378A1
AU2002218378A1 AU2002218378A AU1837802A AU2002218378A1 AU 2002218378 A1 AU2002218378 A1 AU 2002218378A1 AU 2002218378 A AU2002218378 A AU 2002218378A AU 1837802 A AU1837802 A AU 1837802A AU 2002218378 A1 AU2002218378 A1 AU 2002218378A1
Authority
AU
Australia
Prior art keywords
speed
microscopic imaging
interferential
interferential microscopic
imaging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002218378A
Inventor
Claude Boccara
Arnaud Dubois
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Publication of AU2002218378A1 publication Critical patent/AU2002218378A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02057—Passive reduction of errors by using common path configuration, i.e. reference and object path almost entirely overlapping
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02067—Active error reduction, i.e. varying with time by electronic control systems, i.e. using feedback acting on optics or light
    • G01B9/02069—Synchronization of light source or manipulator and detector
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/06—Means for illuminating specimens
    • G02B21/08—Condensers
    • G02B21/14—Condensers affording illumination for phase-contrast observation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/35—Mechanical variable delay line
AU2002218378A 2000-11-17 2001-11-15 Method and device for high-speed interferential microscopic imaging of an object Abandoned AU2002218378A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR0014904 2000-11-17
FR0014904A FR2817030B1 (en) 2000-11-17 2000-11-17 METHOD AND DEVICE FOR MICROSCOPIC INTERFERENTIAL IMAGING OF A HIGH-THROUGHPUT OBJECT
PCT/FR2001/003589 WO2002040937A1 (en) 2000-11-17 2001-11-15 Method and device for high-speed interferential microscopic imaging of an object

Publications (1)

Publication Number Publication Date
AU2002218378A1 true AU2002218378A1 (en) 2002-05-27

Family

ID=8856625

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002218378A Abandoned AU2002218378A1 (en) 2000-11-17 2001-11-15 Method and device for high-speed interferential microscopic imaging of an object

Country Status (8)

Country Link
US (1) US6940602B2 (en)
EP (1) EP1364181B9 (en)
JP (1) JP2004528586A (en)
AU (1) AU2002218378A1 (en)
CA (1) CA2432343C (en)
ES (1) ES2393078T3 (en)
FR (1) FR2817030B1 (en)
WO (1) WO2002040937A1 (en)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7369234B2 (en) * 2003-02-03 2008-05-06 Rudolph Technologies, Inc. Method of performing optical measurement on a sample
WO2007008265A2 (en) * 2005-04-11 2007-01-18 Zetetic Institute Apparatus and method for in situ and ex situ measurement of spatial impulse response of an optical system using phase-shifting point-diffraction interferometry
EP1883783A2 (en) * 2005-05-18 2008-02-06 Zetetic Institute Apparatus and method for in situ and ex situ measurements of optical system flare
TW200706831A (en) * 2005-08-08 2007-02-16 Zetetic Inst Apparatus and methods for reduction and compensation of effects of vibrations and of environmental effects in wavefront interferometry
US7460245B2 (en) * 2005-08-26 2008-12-02 Zetetic Institute Apparatus and method for measurement and compensation of atmospheric turbulence effects in wavefront interferometry
TW200728685A (en) * 2005-11-15 2007-08-01 Zetetic Inst Apparatus and method for reducing effects of coherent artifacts and compensation of effects of vibrations and environmental changes in interferometry
US7460248B2 (en) * 2006-05-15 2008-12-02 Carestream Health, Inc. Tissue imaging system
JP2010025864A (en) * 2008-07-23 2010-02-04 Hamamatsu Photonics Kk Interference measuring apparatus
FR2960291B1 (en) 2010-05-18 2015-04-03 Lltech Man METHOD AND DEVICE FOR FULL-FIELD HIGH-RESOLUTION FIELD INTERFERENTIAL MICROSCOPY
DE102010022421B4 (en) * 2010-06-01 2012-01-05 Carl Mahr Holding Gmbh Measuring device and measuring method for absolute distance measurement
FR2962531B1 (en) 2010-07-08 2014-01-17 Lltech Inc METHOD AND DEVICE FOR THREE-DIMENSIONAL IMAGING BY FULL FIELD INTERFERENTIAL MICROSCOPY
US9310186B2 (en) 2012-04-23 2016-04-12 Ben-Gurion University Of The Negev Research And Development Authority True-spectroscopic dual mode high resolution full-field optical coherence tomography using liquid crystal devices
FR3015659B1 (en) 2013-12-20 2016-01-29 Centre Nat Rech Scient APPARATUS AND METHOD FOR OPTICAL TOMOGRAPHY
JP6413076B2 (en) 2014-10-01 2018-10-31 パナソニックＩｐマネジメント株式会社 Inner layer measurement method and apparatus
US20160143589A1 (en) 2014-11-26 2016-05-26 Panasonic Intellectual Property Management Co., Ltd. Biological measurement device and biological measurement method
DE112015006081T5 (en) * 2015-01-30 2017-11-02 Hamamatsu Photonics K.K. INTERFERENCE OPTICS DEVICE, INTERFERENCE OBSERVATION DEVICE AND INTERFERENCE OBSERVATION PROCEDURE
FR3034858B1 (en) 2015-04-10 2017-05-26 Lltech Man METHOD AND SYSTEM FOR FULL FIELD INTERFERENTIAL MICROSCOPY IMAGING
JP6600080B2 (en) * 2015-08-21 2019-10-30 アプレ インストゥルメンツ， インコーポレイテッド Time multispectral controlled interferometry
FR3050038B1 (en) 2016-04-06 2018-05-18 Lltech Management METHOD AND DEVICE FOR FULL-FIELD INTERFERENTIAL MICROSCOPY IN INCOHERENT LIGHT
FR3084172B1 (en) 2018-07-19 2021-07-02 Centre Nat Rech Scient METHODS AND SYSTEMS FOR THE NON-INVASIVE OPTICAL CHARACTERIZATION OF A HETEROGENOUS MEDIUM
CN109211934B (en) * 2018-08-29 2021-01-26 南京理工大学 Micro-sphere surface defect detection device and method based on interference microscopy
EP3628210A1 (en) 2018-09-28 2020-04-01 Paris Sciences et Lettres - Quartier Latin Methods and systems for in vivo full-field interference microscopy imaging
EP3839417B1 (en) 2019-12-18 2023-08-09 Paris Sciences et Lettres A full-field optical coherence tomography imaging method
US11922623B2 (en) 2020-07-13 2024-03-05 Aquyre Biosciences, Inc. Cellular diagnostic and analysis methods
FR3123427B1 (en) 2021-05-28 2023-05-26 Centre Nat Rech Scient Methods and systems for three-dimensional imaging of a transparent biological object in a biological sample by full-field optical tomography
WO2023203283A1 (en) 2022-04-22 2023-10-26 Sorbonne Universite Module intended to be associated with a microscope, and assembly formed by a microscope and such a module
FR3137967A1 (en) 2022-07-18 2024-01-19 Centre National De La Recherche Scientifique Methods and systems for optical characterization of a volumetric and diffusing medium
WO2024069058A1 (en) 2022-09-29 2024-04-04 Sorbonne Universite Optical device for self-referenced full-field temporal optical coherence tomography microscopic imaging, and associated facility and method

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4818110A (en) * 1986-05-06 1989-04-04 Kla Instruments Corporation Method and apparatus of using a two beam interference microscope for inspection of integrated circuits and the like
FR2664048B1 (en) * 1990-06-29 1993-08-20 Centre Nat Rech Scient MULTICHANNEL ANALOGUE DETECTION METHOD AND DEVICE.
US5194918A (en) * 1991-05-14 1993-03-16 The Board Of Trustees Of The Leland Stanford Junior University Method of providing images of surfaces with a correlation microscope by transforming interference signals
DE60141848D1 (en) * 2000-11-02 2010-05-27 Zygo Corp METHOD AND DEVICE FOR HEAVY-ABBEASTING INTERFEROMETRY WITH PHASE DIFFERENTIAL ANALYSIS

Also Published As

Publication number Publication date
US20040061867A1 (en) 2004-04-01
CA2432343A1 (en) 2002-05-23
EP1364181B9 (en) 2012-11-07
EP1364181A1 (en) 2003-11-26
JP2004528586A (en) 2004-09-16
FR2817030B1 (en) 2003-03-28
EP1364181B1 (en) 2012-08-08
FR2817030A1 (en) 2002-05-24
US6940602B2 (en) 2005-09-06
ES2393078T3 (en) 2012-12-18
WO2002040937A1 (en) 2002-05-23
CA2432343C (en) 2009-10-13

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