AU2002215225A1 - Method for manufacturing objective film, objective film obtained by the method, and laminated structure - Google Patents

Method for manufacturing objective film, objective film obtained by the method, and laminated structure

Info

Publication number
AU2002215225A1
AU2002215225A1 AU2002215225A AU1522502A AU2002215225A1 AU 2002215225 A1 AU2002215225 A1 AU 2002215225A1 AU 2002215225 A AU2002215225 A AU 2002215225A AU 1522502 A AU1522502 A AU 1522502A AU 2002215225 A1 AU2002215225 A1 AU 2002215225A1
Authority
AU
Australia
Prior art keywords
objective film
laminated structure
manufacturing
film obtained
objective
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002215225A
Inventor
Hiroshi Komiyama
Suguru Noda
Yoshiko Tsuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of AU2002215225A1 publication Critical patent/AU2002215225A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/18—Epitaxial-layer growth characterised by the substrate

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Photovoltaic Devices (AREA)
  • Physical Vapour Deposition (AREA)
AU2002215225A 2000-11-20 2001-11-20 Method for manufacturing objective film, objective film obtained by the method, and laminated structure Abandoned AU2002215225A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2000353112 2000-11-20
JP2000-353112 2000-11-20
JP2001230240 2001-07-30
JP2001-230240 2001-07-30
PCT/JP2001/010111 WO2002040751A1 (en) 2000-11-20 2001-11-20 Method for manufacturing objective film, objective film obtained by the method, and laminated structure

Publications (1)

Publication Number Publication Date
AU2002215225A1 true AU2002215225A1 (en) 2002-05-27

Family

ID=26604295

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002215225A Abandoned AU2002215225A1 (en) 2000-11-20 2001-11-20 Method for manufacturing objective film, objective film obtained by the method, and laminated structure

Country Status (3)

Country Link
JP (1) JPWO2002040751A1 (en)
AU (1) AU2002215225A1 (en)
WO (1) WO2002040751A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100799144B1 (en) 2004-01-15 2008-01-29 스구루 노다 Process for producing monocrystal thin film and monocrystal thin film device
EP2256786A1 (en) 2004-01-15 2010-12-01 Japan Science and Technology Agency Process for producing monocrystal thin film and monocrystal thin film device
KR101001912B1 (en) 2008-10-17 2010-12-17 경북대학교 산학협력단 single crystal thin film of using metal silicide seed layer, and manufacturing method thereof

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3360919B2 (en) * 1993-06-11 2003-01-07 三菱電機株式会社 Method of manufacturing thin-film solar cell and thin-film solar cell
JP2000150379A (en) * 1998-11-09 2000-05-30 Toyota Central Res & Dev Lab Inc Manufacture of stack having crystalline semiconductor layer

Also Published As

Publication number Publication date
JPWO2002040751A1 (en) 2004-03-25
WO2002040751A1 (en) 2002-05-23

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