AU2001293220A1 - Transition metal dielectric alloy materials for mems - Google Patents

Transition metal dielectric alloy materials for mems

Info

Publication number
AU2001293220A1
AU2001293220A1 AU2001293220A AU9322001A AU2001293220A1 AU 2001293220 A1 AU2001293220 A1 AU 2001293220A1 AU 2001293220 A AU2001293220 A AU 2001293220A AU 9322001 A AU9322001 A AU 9322001A AU 2001293220 A1 AU2001293220 A1 AU 2001293220A1
Authority
AU
Australia
Prior art keywords
mems
transition metal
alloy materials
metal dielectric
dielectric alloy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001293220A
Inventor
Jason S. Reid
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Reflectivity Inc
Original Assignee
Reflectivity Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/910,537 external-priority patent/US7057246B2/en
Application filed by Reflectivity Inc filed Critical Reflectivity Inc
Publication of AU2001293220A1 publication Critical patent/AU2001293220A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0067—Mechanical properties
    • B81B3/0078—Constitution or structural means for improving mechanical properties not provided for in B81B3/007 - B81B3/0075
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/045—Optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0118—Cantilevers
AU2001293220A 2000-08-23 2001-08-23 Transition metal dielectric alloy materials for mems Abandoned AU2001293220A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US22800700P 2000-08-23 2000-08-23
US60228007 2000-08-23
US09/910,537 US7057246B2 (en) 2000-08-23 2001-07-20 Transition metal dielectric alloy materials for MEMS
US09910537 2001-07-20
PCT/US2001/041872 WO2002016150A1 (en) 2000-08-23 2001-08-23 Transition metal dielectric alloy materials for mems

Publications (1)

Publication Number Publication Date
AU2001293220A1 true AU2001293220A1 (en) 2002-03-04

Family

ID=26921975

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001293220A Abandoned AU2001293220A1 (en) 2000-08-23 2001-08-23 Transition metal dielectric alloy materials for mems

Country Status (2)

Country Link
AU (1) AU2001293220A1 (en)
WO (1) WO2002016150A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100419233B1 (en) 2002-03-11 2004-02-21 삼성전자주식회사 MEMS device and a fabrication method thereof
NL1023275C2 (en) 2003-04-25 2004-10-27 Cavendish Kinetics Ltd Method for manufacturing a micro-mechanical element.
GB0330010D0 (en) 2003-12-24 2004-01-28 Cavendish Kinetics Ltd Method for containing a device and a corresponding device
US7989262B2 (en) 2008-02-22 2011-08-02 Cavendish Kinetics, Ltd. Method of sealing a cavity
US7993950B2 (en) 2008-04-30 2011-08-09 Cavendish Kinetics, Ltd. System and method of encapsulation

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8921722D0 (en) * 1989-09-26 1989-11-08 British Telecomm Micromechanical switch
US5441597A (en) * 1992-12-01 1995-08-15 Honeywell Inc. Microstructure gas valve control forming method

Also Published As

Publication number Publication date
WO2002016150A1 (en) 2002-02-28

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