AU2001292603A1 - Afterglow emission spectroscopy monitor - Google Patents

Afterglow emission spectroscopy monitor

Info

Publication number
AU2001292603A1
AU2001292603A1 AU2001292603A AU9260301A AU2001292603A1 AU 2001292603 A1 AU2001292603 A1 AU 2001292603A1 AU 2001292603 A AU2001292603 A AU 2001292603A AU 9260301 A AU9260301 A AU 9260301A AU 2001292603 A1 AU2001292603 A1 AU 2001292603A1
Authority
AU
Australia
Prior art keywords
emission spectroscopy
afterglow emission
spectroscopy monitor
monitor
afterglow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001292603A
Inventor
Jacob Mettes
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of AU2001292603A1 publication Critical patent/AU2001292603A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/66—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence
    • G01N21/68—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence using high frequency electric fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • H01J37/32972—Spectral analysis

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Engineering & Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
AU2001292603A 2000-09-11 2001-09-10 Afterglow emission spectroscopy monitor Abandoned AU2001292603A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US23158800P 2000-09-11 2000-09-11
US60231588 2000-09-11
US26676301P 2001-02-05 2001-02-05
US60266763 2001-02-05
PCT/US2001/028271 WO2002023160A1 (en) 2000-09-11 2001-09-10 Afterglow emission spectroscopy monitor

Publications (1)

Publication Number Publication Date
AU2001292603A1 true AU2001292603A1 (en) 2002-03-26

Family

ID=26925243

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001292603A Abandoned AU2001292603A1 (en) 2000-09-11 2001-09-10 Afterglow emission spectroscopy monitor

Country Status (3)

Country Link
EP (1) EP1325304A4 (en)
AU (1) AU2001292603A1 (en)
WO (1) WO2002023160A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2955927B1 (en) * 2010-02-01 2012-04-06 Alcatel Lucent DEVICE AND METHOD FOR CONTROLLING A DEHYDRATION OPERATION DURING A LYOPHILIZATION TREATMENT
US8848191B2 (en) 2012-03-14 2014-09-30 Honeywell International Inc. Photoacoustic sensor with mirror
US10267728B2 (en) * 2016-09-28 2019-04-23 Lam Research Corporation Systems and methods for detecting oxygen in-situ in a substrate area of a substrate processing system

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4801209A (en) * 1986-01-17 1989-01-31 The Boc Group, Inc. Process and apparatus for analyzing a gaseous mixture and a visible emission spectrum generator therefor
US5412467A (en) * 1993-03-24 1995-05-02 Praxair Technology, Inc. Gas emission spectrometer and method
US5963336A (en) * 1995-10-10 1999-10-05 American Air Liquide Inc. Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use
KR100253089B1 (en) * 1997-10-29 2000-05-01 윤종용 Chemical vapor deposition apparatus
US6197123B1 (en) * 1997-12-18 2001-03-06 Texas Instruments Incorporated Method for cleaning a process chamber used for manufacturing substrates during nonproduction intervals
US6105589A (en) * 1999-01-11 2000-08-22 Vane; Ronald A. Oxidative cleaning method and apparatus for electron microscopes using an air plasma as an oxygen radical source

Also Published As

Publication number Publication date
WO2002023160A1 (en) 2002-03-21
EP1325304A1 (en) 2003-07-09
EP1325304A4 (en) 2006-05-17

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