AU2001283530A1 - Dual-domain lateral shearing interferometer - Google Patents

Dual-domain lateral shearing interferometer

Info

Publication number
AU2001283530A1
AU2001283530A1 AU2001283530A AU8353001A AU2001283530A1 AU 2001283530 A1 AU2001283530 A1 AU 2001283530A1 AU 2001283530 A AU2001283530 A AU 2001283530A AU 8353001 A AU8353001 A AU 8353001A AU 2001283530 A1 AU2001283530 A1 AU 2001283530A1
Authority
AU
Australia
Prior art keywords
dual
shearing interferometer
lateral shearing
domain
domain lateral
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001283530A
Inventor
Kenneth Alan Goldberg
Patrick P. Naulleau
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of California
Original Assignee
University of California
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of California filed Critical University of California
Publication of AU2001283530A1 publication Critical patent/AU2001283530A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/0271—Testing optical properties by measuring geometrical properties or aberrations by using interferometric methods
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70591—Testing optical components
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70591—Testing optical components
    • G03F7/706—Aberration measurement
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
    • G03F7/70941—Stray fields and charges, e.g. stray light, scattered light, flare, transmission loss

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Epidemiology (AREA)
  • Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Geometry (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
AU2001283530A 2000-08-04 2001-07-31 Dual-domain lateral shearing interferometer Abandoned AU2001283530A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/632,631 US6707560B1 (en) 1998-10-21 2000-08-04 Dual-domain lateral shearing interferometer
US09632631 2000-08-04
PCT/US2001/041514 WO2002012826A1 (en) 2000-08-04 2001-07-31 Dual-domain lateral shearing interferometer

Publications (1)

Publication Number Publication Date
AU2001283530A1 true AU2001283530A1 (en) 2002-02-18

Family

ID=24536295

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001283530A Abandoned AU2001283530A1 (en) 2000-08-04 2001-07-31 Dual-domain lateral shearing interferometer

Country Status (3)

Country Link
US (1) US6707560B1 (en)
AU (1) AU2001283530A1 (en)
WO (1) WO2002012826A1 (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6424426B1 (en) * 2000-03-28 2002-07-23 Mongonet Fax-to-email and email-to-fax communication system and method
AUPS328402A0 (en) * 2002-06-28 2002-07-18 Australian Photonics Pty Limited Writing of photo-induced structures
DE10258142A1 (en) * 2002-12-04 2004-06-24 Carl Zeiss Smt Ag Device for the optical measurement of an imaging system
JP2005159213A (en) 2003-11-28 2005-06-16 Canon Inc Measuring method and apparatus using shearing interference, exposure method and apparatus using the same, and device manufacturing method
JP2006332586A (en) * 2005-04-25 2006-12-07 Canon Inc Measuring device, device and method for exposing, and device manufacturing method
JP2007234685A (en) * 2006-02-28 2007-09-13 Canon Inc Measuring device, exposure device therewith and method of manufacturing the same
DE102007054683A1 (en) 2007-11-14 2009-05-28 Carl Zeiss Smt Ag Illumination optics for guiding a radiation bundle of a radiation source in microlithography comprises an optical bundle guiding component arranged between an emission volume and the object field
US8045178B2 (en) * 2008-03-28 2011-10-25 Optical Physics Company Interferometric tracking device
JP5725874B2 (en) * 2011-01-14 2015-05-27 キヤノン株式会社 Shearing interference measuring apparatus and calibration method thereof
US9360423B2 (en) * 2011-07-01 2016-06-07 Canon Kabushiki Kaisha Optical system for a holographic microscope including a spatial filter
CN102818540A (en) * 2012-08-28 2012-12-12 西北工业大学 Method for generating grating with sinusoidal strips by sinusoidal pulse width modulation technology
JP6173188B2 (en) * 2013-11-28 2017-08-02 キヤノン株式会社 Apparatus for measuring optical performance of optical element to be tested, program and method for controlling the measuring apparatus
US10883924B2 (en) 2014-09-08 2021-01-05 The Research Foundation Of State University Of New York Metallic gratings and measurement methods thereof

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5095503A (en) 1989-12-20 1992-03-10 Motorola, Inc. Cellular telephone controller with synthesized voice feedback for directory number confirmation and call status
WO1992020991A1 (en) * 1991-05-14 1992-11-26 Blue Sky Research, Inc. Dynamic shearing interferometer
US6111646A (en) 1999-01-12 2000-08-29 Naulleau; Patrick Null test fourier domain alignment technique for phase-shifting point diffraction interferometer

Also Published As

Publication number Publication date
US6707560B1 (en) 2004-03-16
WO2002012826A1 (en) 2002-02-14

Similar Documents

Publication Publication Date Title
AU4362200A (en) Dual-domain point diffraction interferometer
AU2001243553A1 (en) Microreactor
AU2001284246A1 (en) Electrosurgery system
AU2002221601A1 (en) Disinfectant
AU2001269508A1 (en) Drugs or cosmetics
AU2001250612A1 (en) Shearing processor
AU2001291783A1 (en) Encryption
AU2001255725A1 (en) Easy cutter
AU2001283530A1 (en) Dual-domain lateral shearing interferometer
AU4277601A (en) Microscope unit
AU2002221099A1 (en) Combination drugs
AU2001220281A1 (en) Rollerboard for road-skiing
AU2001284047A1 (en) Butinol I esterase
AU2000257557A1 (en) Holographic desktop monitor
AU2001278773A1 (en) Novel pla1
AU5090000A (en) Barriers
AU2000238755A1 (en) Dermatological compounds
AU2001292578A1 (en) Pharmaceutical compounds
AU2002228216A1 (en) Interferometer
AU2002228911A1 (en) Methods for inhibiting pain
AUPQ931500A0 (en) System for trading produts
AU2001229209A1 (en) Hydrokeratome for refractive surgery
AU2001273299A1 (en) Anti-mycobacterial compounds
AU2002229540A1 (en) Encryption system
AU2001269267A1 (en) Kerb