AU2001282095A1 - Rotation speed sensor and rotation speed sensor system - Google Patents

Rotation speed sensor and rotation speed sensor system

Info

Publication number
AU2001282095A1
AU2001282095A1 AU2001282095A AU8209501A AU2001282095A1 AU 2001282095 A1 AU2001282095 A1 AU 2001282095A1 AU 2001282095 A AU2001282095 A AU 2001282095A AU 8209501 A AU8209501 A AU 8209501A AU 2001282095 A1 AU2001282095 A1 AU 2001282095A1
Authority
AU
Australia
Prior art keywords
rotation speed
speed sensor
sensor system
rotation
speed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001282095A
Other languages
English (en)
Inventor
Wolfram Geiger
Walter Lang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hann-Schickard-Gesellschaft fuer Angewandte Forschung eV
Original Assignee
Hann-Schickard-Gesellschaft fuer Angewandte Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hann-Schickard-Gesellschaft fuer Angewandte Forschung eV filed Critical Hann-Schickard-Gesellschaft fuer Angewandte Forschung eV
Publication of AU2001282095A1 publication Critical patent/AU2001282095A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/5755—Structural details or topology the devices having a single sensing mass
    • G01C19/5762—Structural details or topology the devices having a single sensing mass the sensing mass being connected to a driving mass, e.g. driving frames
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
AU2001282095A 2000-08-18 2001-08-14 Rotation speed sensor and rotation speed sensor system Abandoned AU2001282095A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10040418 2000-08-18
DE2000140418 DE10040418A1 (de) 2000-08-18 2000-08-18 Drehratensensor und Drehratensensorsystem
PCT/EP2001/009400 WO2002016871A1 (de) 2000-08-18 2001-08-14 Drehratensensor und drehratensensorsystem

Publications (1)

Publication Number Publication Date
AU2001282095A1 true AU2001282095A1 (en) 2002-03-04

Family

ID=7652879

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001282095A Abandoned AU2001282095A1 (en) 2000-08-18 2001-08-14 Rotation speed sensor and rotation speed sensor system

Country Status (4)

Country Link
EP (1) EP1309834B1 (de)
AU (1) AU2001282095A1 (de)
DE (2) DE10040418A1 (de)
WO (1) WO2002016871A1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10108197A1 (de) * 2001-02-21 2002-09-12 Bosch Gmbh Robert Drehratensensor
JP2002296039A (ja) 2001-03-30 2002-10-09 Murata Mfg Co Ltd ジャイロ装置およびそれを用いた電子装置
US6722197B2 (en) 2001-06-19 2004-04-20 Honeywell International Inc. Coupled micromachined structure
JP3870895B2 (ja) * 2002-01-10 2007-01-24 株式会社村田製作所 角速度センサ
DE10360963B4 (de) * 2003-12-23 2007-05-16 Litef Gmbh Verfahren zur Messung von Drehraten/Beschleunigungen unter Verwendung eines Drehraten-Corioliskreisels sowie dafür geeigneter Corioliskreisel
CN1948906B (zh) * 2006-11-10 2011-03-23 北京大学 一种电容式全解耦水平轴微机械陀螺
DE102007017209B4 (de) 2007-04-05 2014-02-27 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromechanischer Inertialsensor zur Messung von Drehraten
DE102007030120B4 (de) 2007-06-29 2010-04-08 Litef Gmbh Drehratensensor
DE102009061797B3 (de) * 2009-02-27 2020-12-10 Hanking Electronics, Ltd. MEMS-Gyroskop zur Ermittlung von Rotationsbewegungen um eine x-, y-, oder z-Achse
DE102009026511A1 (de) * 2009-05-27 2010-12-02 Sensordynamics Ag Mikro-Gyroskop zur Ermittlung von Rotationsbewegungen um mindestens eine von drei senkrecht aufeinanderstehenden Raumachsen
JP4968298B2 (ja) 2009-09-04 2012-07-04 株式会社デンソー 振動型角速度センサ
WO2018152507A1 (en) 2017-02-17 2018-08-23 Invensense, Inc. Anchoring structure for a sensor insensitive to anchor movement
US10551191B2 (en) 2017-02-17 2020-02-04 Invensense, Inc. Deformation rejection mechanism for offset minimization of out-of-plane sensing MEMS device
WO2019209659A1 (en) * 2018-04-26 2019-10-31 Invensense, Inc. Deformation rejection mechanism for offset minimization of out-of-plane sensing mems device

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4414237A1 (de) * 1994-04-23 1995-10-26 Bosch Gmbh Robert Mikromechanischer Schwinger eines Schwingungsgyrometers
DE4428405A1 (de) * 1994-08-11 1996-02-15 Karlsruhe Forschzent Drehratensensor
DE19641284C1 (de) * 1996-10-07 1998-05-20 Inst Mikro Und Informationstec Drehratensensor mit entkoppelten orthogonalen Primär- und Sekundärschwingungen
US6122961A (en) * 1997-09-02 2000-09-26 Analog Devices, Inc. Micromachined gyros
WO2000029855A1 (en) * 1998-10-14 2000-05-25 Irvine Sensors Corporation Multi-element micro-gyro

Also Published As

Publication number Publication date
EP1309834A1 (de) 2003-05-14
EP1309834B1 (de) 2007-04-18
DE10040418A1 (de) 2002-03-07
WO2002016871A1 (de) 2002-02-28
DE50112380D1 (de) 2007-05-31

Similar Documents

Publication Publication Date Title
AU2002213899A1 (en) Magnetic torque sensor system
AU2001280734A1 (en) Combined hub temperature and wheel speed sensor system
AU3447100A (en) Torque and speed sensor
WO2002019698A8 (en) Sensor and imaging system
AU2182199A (en) Micro-electro-opto-mechanical inertial sensor
AU8033300A (en) Low-cost accelerometer
AU2873200A (en) Non-contacting sensors
AU2002220877A1 (en) Speed governor
AU2002234176A1 (en) Glucose sensor system
AU2069099A (en) Sensor
AU4420800A (en) Position sensor
AU2001265987A1 (en) Magnetic-based torque/speed sensor
GB9802064D0 (en) Combined torque and angular position sensor
AU2001282095A1 (en) Rotation speed sensor and rotation speed sensor system
AU7683700A (en) Co sensor
AU2001279283A1 (en) Optical position sensor and position determination method
EP1186872A4 (de) Rotationssensor
AUPQ489999A0 (en) Improved speed limiter
AU5435400A (en) Low-power sensor
AUPQ095599A0 (en) Engine speed control system
AU5251300A (en) Acceleration sensor
AU1288901A (en) Sensor device
AU4086001A (en) Sensor systems
AU2283799A (en) Rotational speed reducing device
AU4152200A (en) Sensing system and use thereof