AU2001275542A1 - Aqueous-based photolithography on organic materials - Google Patents

Aqueous-based photolithography on organic materials

Info

Publication number
AU2001275542A1
AU2001275542A1 AU2001275542A AU7554201A AU2001275542A1 AU 2001275542 A1 AU2001275542 A1 AU 2001275542A1 AU 2001275542 A AU2001275542 A AU 2001275542A AU 7554201 A AU7554201 A AU 7554201A AU 2001275542 A1 AU2001275542 A1 AU 2001275542A1
Authority
AU
Australia
Prior art keywords
aqueous
organic materials
based photolithography
photolithography
organic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001275542A
Inventor
Thomas N. Jackson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Penn State Research Foundation
Original Assignee
Penn State Research Foundation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Penn State Research Foundation filed Critical Penn State Research Foundation
Publication of AU2001275542A1 publication Critical patent/AU2001275542A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/20—Changing the shape of the active layer in the devices, e.g. patterning
    • H10K71/231—Changing the shape of the active layer in the devices, e.g. patterning by etching of existing layers
    • H10K71/233—Changing the shape of the active layer in the devices, e.g. patterning by etching of existing layers by photolithographic etching
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40—Organic transistors
    • H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/80—Constructional details
    • H10K10/88—Passivation; Containers; Encapsulations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/10—Organic polymers or oligomers
    • H10K85/141—Organic polymers or oligomers comprising aliphatic or olefinic chains, e.g. poly N-vinylcarbazol, PVC or PTFE
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/60—Organic compounds having low molecular weight
    • H10K85/615—Polycyclic condensed aromatic hydrocarbons, e.g. anthracene

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Thin Film Transistor (AREA)
  • Materials For Photolithography (AREA)
AU2001275542A 2000-06-16 2001-06-15 Aqueous-based photolithography on organic materials Abandoned AU2001275542A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US21218900P 2000-06-16 2000-06-16
US60212189 2000-06-16
PCT/US2001/041006 WO2001097297A1 (en) 2000-06-16 2001-06-15 Aqueous-based photolithography on organic materials

Publications (1)

Publication Number Publication Date
AU2001275542A1 true AU2001275542A1 (en) 2001-12-24

Family

ID=22789934

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001275542A Abandoned AU2001275542A1 (en) 2000-06-16 2001-06-15 Aqueous-based photolithography on organic materials

Country Status (3)

Country Link
US (1) US6696370B2 (en)
AU (1) AU2001275542A1 (en)
WO (1) WO2001097297A1 (en)

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US6821811B2 (en) * 2002-08-02 2004-11-23 Semiconductor Energy Laboratory Co., Ltd. Organic thin film transistor and method of manufacturing the same, and semiconductor device having the organic thin film transistor
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JP4228204B2 (en) * 2003-07-07 2009-02-25 セイコーエプソン株式会社 Manufacturing method of organic transistor
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US7659138B2 (en) * 2003-12-26 2010-02-09 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing an organic semiconductor element
US7554121B2 (en) 2003-12-26 2009-06-30 Semiconductor Energy Laboratory Co., Ltd. Organic semiconductor device
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DE102004009600B4 (en) * 2004-02-27 2008-04-03 Qimonda Ag Self-organizing organic dielectric layers based on phosphonic acid derivatives
KR101061845B1 (en) * 2004-06-14 2011-09-02 삼성전자주식회사 Thin film transistor array panel using organic semiconductor and manufacturing method thereof
JP4431081B2 (en) * 2004-08-30 2010-03-10 エルジー ディスプレイ カンパニー リミテッド Method for manufacturing organic thin film transistor and method for manufacturing liquid crystal display element
KR100668407B1 (en) 2004-10-15 2007-01-16 한국전자통신연구원 Photo-Reactive Organic Polymeric Gate Insulating Film and Organic Thin-Film Transister Using the Same
KR100670255B1 (en) * 2004-12-23 2007-01-16 삼성에스디아이 주식회사 TFT, flat panel display therewith, manufacturing method of the TFT, and manufacturing method of the flat panel display
KR20070097085A (en) * 2004-12-30 2007-10-02 이 아이 듀폰 디 네모아 앤드 캄파니 Device patterning using irradiation
US20060185975A1 (en) * 2005-02-22 2006-08-24 Pentam, Inc. Decomposition unit
JP4667096B2 (en) * 2005-03-25 2011-04-06 株式会社半導体エネルギー研究所 Organic semiconductor device and manufacturing method thereof
KR100647690B1 (en) * 2005-04-22 2006-11-23 삼성에스디아이 주식회사 Thin film transistor and flat panel display apparatus comprising the same
JP2007035742A (en) 2005-07-25 2007-02-08 Seiko Epson Corp Thin-film transistor forming method
KR100953652B1 (en) * 2005-08-18 2010-04-20 삼성모바일디스플레이주식회사 Organic thin film transistor and manufacturing method thereof
JP5148086B2 (en) * 2005-08-18 2013-02-20 三星電子株式会社 Organic thin film transistor display panel
KR101244898B1 (en) 2006-06-28 2013-03-19 삼성디스플레이 주식회사 Organic Thin Film Transistor Substrate And Fabricating Method Thereof
EP1930963B1 (en) * 2006-12-07 2016-03-02 Samsung Display Co., Ltd. Method of manufacturing a semiconducting device and semiconducting device
US8981348B2 (en) * 2006-12-07 2015-03-17 Samsung Display Co., Ltd. Semiconducting element, organic light emitting display including the same, and method of manufacturing the semiconducting element
US7858975B2 (en) 2007-03-12 2010-12-28 The Trustees Of Columbia University In The City Of New York Organic field effect transistor systems and methods
CN101267018B (en) * 2007-03-13 2013-03-20 奇美电子股份有限公司 Selective organic semiconductor active layer and its use
US7683323B2 (en) * 2007-03-20 2010-03-23 The Trustees Of Columbia University In The City Of New York Organic field effect transistor systems and methods
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US10705114B2 (en) 2014-03-12 2020-07-07 Oxford Instruments Asylum Research Inc Metrological scanning probe microscope

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Also Published As

Publication number Publication date
US20020022299A1 (en) 2002-02-21
US6696370B2 (en) 2004-02-24
WO2001097297A1 (en) 2001-12-20

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