AU2001268041A1 - Capacitive sensing scheme for digital control state detection in optical switches - Google Patents

Capacitive sensing scheme for digital control state detection in optical switches

Info

Publication number
AU2001268041A1
AU2001268041A1 AU2001268041A AU6804101A AU2001268041A1 AU 2001268041 A1 AU2001268041 A1 AU 2001268041A1 AU 2001268041 A AU2001268041 A AU 2001268041A AU 6804101 A AU6804101 A AU 6804101A AU 2001268041 A1 AU2001268041 A1 AU 2001268041A1
Authority
AU
Australia
Prior art keywords
control state
state detection
digital control
capacitive sensing
optical switches
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001268041A
Inventor
Timothy J. Beerling
Behrang Behin
Michael J. Daneman
Meng-Hsiung Kiang
Kam-Yin Lau
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Onix Microsystems Inc
Original Assignee
Onix Microsystems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Onix Microsystems Inc filed Critical Onix Microsystems Inc
Publication of AU2001268041A1 publication Critical patent/AU2001268041A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/3564Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/358Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/3586Control or adjustment details, e.g. calibrating
    • G02B6/359Control or adjustment details, e.g. calibrating of the position of the moving element itself during switching, i.e. without monitoring the switched beams
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/351Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/354Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/35442D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3546NxM switch, i.e. a regular array of switches elements of matrix type constellation
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/3564Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357Electrostatic force
AU2001268041A 2000-04-10 2001-04-04 Capacitive sensing scheme for digital control state detection in optical switches Abandoned AU2001268041A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US19605500P 2000-04-10 2000-04-10
US60196055 2000-04-10
US09724948 2000-11-28
US09/724,948 US6788520B1 (en) 2000-04-10 2000-11-28 Capacitive sensing scheme for digital control state detection in optical switches
PCT/US2001/011047 WO2001077735A2 (en) 2000-04-10 2001-04-04 Capacitive sensing scheme for digital control state detection in optical switches

Publications (1)

Publication Number Publication Date
AU2001268041A1 true AU2001268041A1 (en) 2001-10-23

Family

ID=26891625

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001268041A Abandoned AU2001268041A1 (en) 2000-04-10 2001-04-04 Capacitive sensing scheme for digital control state detection in optical switches

Country Status (3)

Country Link
US (1) US6788520B1 (en)
AU (1) AU2001268041A1 (en)
WO (1) WO2001077735A2 (en)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100703140B1 (en) 1998-04-08 2007-04-05 이리다임 디스플레이 코포레이션 Interferometric modulation and its manufacturing method
US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
EP1357408B1 (en) * 2002-04-15 2004-08-18 Alcatel An optical switch fabric comprising a micro mirror array and method therefore
US7142346B2 (en) * 2003-12-09 2006-11-28 Idc, Llc System and method for addressing a MEMS display
US7158278B2 (en) * 2004-04-12 2007-01-02 Alexander Kastalsky Display device based on bistable electrostatic shutter
JP2006065272A (en) * 2004-07-28 2006-03-09 Sony Corp Hologram apparatus, positioning method for spatial light modulator and image pick-up device, and hologram recording material
US7551159B2 (en) * 2004-08-27 2009-06-23 Idc, Llc System and method of sensing actuation and release voltages of an interferometric modulator
US7889163B2 (en) 2004-08-27 2011-02-15 Qualcomm Mems Technologies, Inc. Drive method for MEMS devices
US8878825B2 (en) 2004-09-27 2014-11-04 Qualcomm Mems Technologies, Inc. System and method for providing a variable refresh rate of an interferometric modulator display
US7136213B2 (en) 2004-09-27 2006-11-14 Idc, Llc Interferometric modulators having charge persistence
US7679627B2 (en) * 2004-09-27 2010-03-16 Qualcomm Mems Technologies, Inc. Controller and driver features for bi-stable display
US7532195B2 (en) 2004-09-27 2009-05-12 Idc, Llc Method and system for reducing power consumption in a display
US7843410B2 (en) 2004-09-27 2010-11-30 Qualcomm Mems Technologies, Inc. Method and device for electrically programmable display
US8310441B2 (en) 2004-09-27 2012-11-13 Qualcomm Mems Technologies, Inc. Method and system for writing data to MEMS display elements
US7724993B2 (en) 2004-09-27 2010-05-25 Qualcomm Mems Technologies, Inc. MEMS switches with deforming membranes
US7675669B2 (en) * 2004-09-27 2010-03-09 Qualcomm Mems Technologies, Inc. Method and system for driving interferometric modulators
US7503989B2 (en) * 2004-12-17 2009-03-17 Hewlett-Packard Development Company, L.P. Methods and systems for aligning and coupling devices
EP1878001A1 (en) 2005-05-05 2008-01-16 QUALCOMM Incorporated, Inc. Dynamic driver ic and display panel configuration
US7920136B2 (en) 2005-05-05 2011-04-05 Qualcomm Mems Technologies, Inc. System and method of driving a MEMS display device
US7948457B2 (en) 2005-05-05 2011-05-24 Qualcomm Mems Technologies, Inc. Systems and methods of actuating MEMS display elements
US8391630B2 (en) 2005-12-22 2013-03-05 Qualcomm Mems Technologies, Inc. System and method for power reduction when decompressing video streams for interferometric modulator displays
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US8194056B2 (en) 2006-02-09 2012-06-05 Qualcomm Mems Technologies Inc. Method and system for writing data to MEMS display elements
US8049713B2 (en) 2006-04-24 2011-11-01 Qualcomm Mems Technologies, Inc. Power consumption optimized display update
US7702192B2 (en) * 2006-06-21 2010-04-20 Qualcomm Mems Technologies, Inc. Systems and methods for driving MEMS display
US7777715B2 (en) 2006-06-29 2010-08-17 Qualcomm Mems Technologies, Inc. Passive circuits for de-multiplexing display inputs
EP2252546A2 (en) 2008-02-11 2010-11-24 QUALCOMM MEMS Technologies, Inc. Measurement and apparatus for electrical measurement of electrical drive parameters for a mems based display
US8736590B2 (en) 2009-03-27 2014-05-27 Qualcomm Mems Technologies, Inc. Low voltage driver scheme for interferometric modulators
US10078032B2 (en) 2016-06-21 2018-09-18 Stmicroelectronics Ltd Circuit for detection of failure of a movable MEMS mirror
US10048488B2 (en) * 2016-11-10 2018-08-14 Stmicroelectronics Ltd Circuit for detection of failure of movable MEMS mirror

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4580873A (en) 1983-12-30 1986-04-08 At&T Bell Laboratories Optical matrix switch
US4935700A (en) * 1985-08-09 1990-06-19 Washington Research Foundation Fringe field capacitive sensor for measuring the size of an opening
CA2026873C (en) * 1989-10-04 1997-06-17 Stephen C. Jacobsen Mechanical/electrical displacement transducer
US5043043A (en) 1990-06-22 1991-08-27 Massachusetts Institute Of Technology Method for fabricating side drive electrostatic micromotor
US5412265A (en) 1993-04-05 1995-05-02 Ford Motor Company Planar micro-motor and method of fabrication
US5488862A (en) 1993-10-18 1996-02-06 Armand P. Neukermans Monolithic silicon rate-gyro with integrated sensors
US5914507A (en) 1994-05-11 1999-06-22 Regents Of The University Of Minnesota PZT microdevice
EP0683414A1 (en) 1994-05-20 1995-11-22 State Of Israel - Ministry Of Defence Optical scanning apparatus
US5717631A (en) 1995-07-21 1998-02-10 Carnegie Mellon University Microelectromechanical structure and process of making same
US5963788A (en) 1995-09-06 1999-10-05 Sandia Corporation Method for integrating microelectromechanical devices with electronic circuitry
US5638946A (en) 1996-01-11 1997-06-17 Northeastern University Micromechanical switch with insulated switch contact
US5881598A (en) 1996-06-27 1999-03-16 Milli Sensor Systems And Actuators, Inc. Flat-pack gyroscope
US6025951A (en) 1996-11-27 2000-02-15 National Optics Institute Light modulating microdevice and method
US5971355A (en) 1996-11-27 1999-10-26 Xerox Corporation Microdevice valve structures to fluid control
US5969848A (en) * 1997-07-03 1999-10-19 The Regents Of The University Of California Micromachined electrostatic vertical actuator
US5867302A (en) 1997-08-07 1999-02-02 Sandia Corporation Bistable microelectromechanical actuator
US5960132A (en) * 1997-09-09 1999-09-28 At&T Corp. Fiber-optic free-space micromachined matrix switches
US5998906A (en) 1998-01-13 1999-12-07 Seagate Technology, Inc. Electrostatic microactuator and method for use thereof
JP4001436B2 (en) * 1998-07-23 2007-10-31 三菱電機株式会社 Optical switch and optical path switching device using optical switch
US6962830B1 (en) 1999-03-09 2005-11-08 The Regents Of The University Of California Global mechanical stop
US6396976B1 (en) * 1999-04-15 2002-05-28 Solus Micro Technologies, Inc. 2D optical switch
US6396975B1 (en) 2000-01-21 2002-05-28 Jds Uniphase Corporation MEMS optical cross-connect switch

Also Published As

Publication number Publication date
US6788520B1 (en) 2004-09-07
WO2001077735A2 (en) 2001-10-18
WO2001077735A3 (en) 2002-05-16

Similar Documents

Publication Publication Date Title
AU2001268041A1 (en) Capacitive sensing scheme for digital control state detection in optical switches
AU2001242717A1 (en) Tactile sensor
AU2001268742A1 (en) Capacitive microelectromechanical switches
HK1062041A1 (en) Capacitive sensor
AUPQ835100A0 (en) Position sensor
AU2001234961A1 (en) Optical pressure sensor
AU2001255172A1 (en) Biometric sensor
EP1148315A3 (en) Capacitive thickness measurement
AU1613899A (en) Capacitive force sensor
AU5570400A (en) Acoustic touch sensor
AU5570500A (en) Acoustic touch sensor
AU4420800A (en) Position sensor
AU2001288054A1 (en) Optical sensor
AU2003290695A1 (en) Smart switch comprising magnetoresistive sensors
AU5862300A (en) Apparatus comprising capacitive proximity sensor
AU2001265738A1 (en) Fiber-optic current sensor
AU2001257074A1 (en) System to detect protein-protein interactions
AU2001293770A1 (en) Displacement detecting element
AU2730000A (en) Optical sensor
GB0009930D0 (en) Capacitive sensor
FR2791593B1 (en) TOUCH SENSOR
AU2001252502A1 (en) Displacement sensing system
AU1335101A (en) An optical sensor for opaque and non-opaque materials
AU2311500A (en) Position sensing
AU2001284230A1 (en) Controller for a capacitive sensor