AU2001247407A1 - Dense fluid cleaning centrifugal phase shifting separation process and apparatus - Google Patents

Dense fluid cleaning centrifugal phase shifting separation process and apparatus

Info

Publication number
AU2001247407A1
AU2001247407A1 AU2001247407A AU4740701A AU2001247407A1 AU 2001247407 A1 AU2001247407 A1 AU 2001247407A1 AU 2001247407 A AU2001247407 A AU 2001247407A AU 4740701 A AU4740701 A AU 4740701A AU 2001247407 A1 AU2001247407 A1 AU 2001247407A1
Authority
AU
Australia
Prior art keywords
separation process
phase shifting
dense fluid
fluid cleaning
cleaning centrifugal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001247407A
Inventor
David P. Jackson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Deflex LLC
Original Assignee
Deflex LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Deflex LLC filed Critical Deflex LLC
Publication of AU2001247407A1 publication Critical patent/AU2001247407A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0021—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by liquid gases or supercritical fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D11/00—Solvent extraction
    • B01D11/04—Solvent extraction of solutions which are liquid
    • B01D11/0403—Solvent extraction of solutions which are liquid with a supercritical fluid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D11/00—Solvent extraction
    • B01D11/04—Solvent extraction of solutions which are liquid
    • B01D11/0403—Solvent extraction of solutions which are liquid with a supercritical fluid
    • B01D11/0407—Solvent extraction of solutions which are liquid with a supercritical fluid the supercritical fluid acting as solvent for the solute
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D11/00—Solvent extraction
    • B01D11/04—Solvent extraction of solutions which are liquid
    • B01D11/0476—Moving receptacles, e.g. rotating receptacles
    • B01D11/048—Mixing by counter-current streams provoked by centrifugal force, in rotating coils or in other rotating spaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D17/00—Separation of liquids, not provided for elsewhere, e.g. by thermal diffusion
    • B01D17/02—Separation of non-miscible liquids
    • B01D17/0205—Separation of non-miscible liquids by gas bubbles or moving solids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D17/00—Separation of liquids, not provided for elsewhere, e.g. by thermal diffusion
    • B01D17/02—Separation of non-miscible liquids
    • B01D17/0217—Separation of non-miscible liquids by centrifugal force
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D17/00—Separation of liquids, not provided for elsewhere, e.g. by thermal diffusion
    • B01D17/02—Separation of non-miscible liquids
    • B01D17/04—Breaking emulsions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D17/00—Separation of liquids, not provided for elsewhere, e.g. by thermal diffusion
    • B01D17/02—Separation of non-miscible liquids
    • B01D17/04—Breaking emulsions
    • B01D17/044—Breaking emulsions by changing the pressure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D17/00—Separation of liquids, not provided for elsewhere, e.g. by thermal diffusion
    • B01D17/02—Separation of non-miscible liquids
    • B01D17/04—Breaking emulsions
    • B01D17/048—Breaking emulsions by changing the state of aggregation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/06—Cleaning involving contact with liquid using perforated drums in which the article or material is placed
AU2001247407A 2000-03-13 2001-03-13 Dense fluid cleaning centrifugal phase shifting separation process and apparatus Abandoned AU2001247407A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US18907900P 2000-03-13 2000-03-13
US60189079 2000-03-13
PCT/US2001/008054 WO2001068279A2 (en) 2000-03-13 2001-03-13 Dense fluid cleaning centrifugal phase shifting separation process and apparatus

Publications (1)

Publication Number Publication Date
AU2001247407A1 true AU2001247407A1 (en) 2001-09-24

Family

ID=22695831

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001247407A Abandoned AU2001247407A1 (en) 2000-03-13 2001-03-13 Dense fluid cleaning centrifugal phase shifting separation process and apparatus

Country Status (3)

Country Link
US (1) US6802961B2 (en)
AU (1) AU2001247407A1 (en)
WO (1) WO2001068279A2 (en)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7044143B2 (en) * 1999-05-14 2006-05-16 Micell Technologies, Inc. Detergent injection systems and methods for carbon dioxide microelectronic substrate processing systems
US6755871B2 (en) * 1999-10-15 2004-06-29 R.R. Street & Co. Inc. Cleaning system utilizing an organic cleaning solvent and a pressurized fluid solvent
US6558432B2 (en) * 1999-10-15 2003-05-06 R. R. Street & Co., Inc. Cleaning system utilizing an organic cleaning solvent and a pressurized fluid solvent
US7097715B1 (en) * 2000-10-11 2006-08-29 R. R. Street Co. Inc. Cleaning system utilizing an organic cleaning solvent and a pressurized fluid solvent
US6748960B1 (en) 1999-11-02 2004-06-15 Tokyo Electron Limited Apparatus for supercritical processing of multiple workpieces
TW544797B (en) * 2001-04-17 2003-08-01 Kobe Steel Ltd High-pressure processing apparatus
US6924086B1 (en) * 2002-02-15 2005-08-02 Tokyo Electron Limited Developing photoresist with supercritical fluid and developer
US6889508B2 (en) * 2002-10-02 2005-05-10 The Boc Group, Inc. High pressure CO2 purification and supply system
EP1459812A1 (en) * 2003-03-21 2004-09-22 Linde Aktiengesellschaft Parts cleaning
WO2004082858A1 (en) * 2003-03-21 2004-09-30 Linde Aktiengesellschaft Parts cleaning
WO2004101181A2 (en) * 2003-05-13 2004-11-25 Ekc Technology, Inc. System and method for cleaning of workpieces using supercritical carbon dioxide
EP1618970A1 (en) * 2004-07-22 2006-01-25 Linde Aktiengesellschaft Carbon dioxide cleaning method
US20060065189A1 (en) * 2004-09-30 2006-03-30 Darko Babic Method and system for homogenization of supercritical fluid in a high pressure processing system
US7550075B2 (en) * 2005-03-23 2009-06-23 Tokyo Electron Ltd. Removal of contaminants from a fluid
US7767145B2 (en) 2005-03-28 2010-08-03 Toyko Electron Limited High pressure fourier transform infrared cell
US7789971B2 (en) 2005-05-13 2010-09-07 Tokyo Electron Limited Treatment of substrate using functionalizing agent in supercritical carbon dioxide
JP4626490B2 (en) * 2005-11-07 2011-02-09 ソニー株式会社 Circuit equipment
CA2827517C (en) * 2011-02-17 2015-07-21 Champion Technologies, Inc. Thermal phase separation simulator
US10639691B1 (en) 2012-01-05 2020-05-05 David P. Jackson Method for forming and applying an oxygenated machining fluid
US9352355B1 (en) 2012-04-15 2016-05-31 David P. Jackson Particle-plasma ablation process
US9381574B1 (en) * 2014-07-18 2016-07-05 Cleanlogix Llc Method and apparatus for cutting and cleaning a superhard substrate
US20170299230A1 (en) * 2016-03-08 2017-10-19 Co2Nexus, Inc. Thermodynamic management for integrated densified fluid-based textile treatment
US10799869B2 (en) 2017-02-23 2020-10-13 Sartorius Stedim North America Inc. Fluid transport apparatus, flexible conduit, method of manufacturing flexible conduit, and storage method
US10576493B2 (en) * 2017-03-14 2020-03-03 Tokyo Electron Limited Substrate processing apparatus and substrate processing method
WO2018187513A1 (en) 2017-04-04 2018-10-11 Cleanlogix Llc Passive electrostatic co2 composite spray applicator
KR102358561B1 (en) 2017-06-08 2022-02-04 삼성전자주식회사 Substrate processing apparatus and apparatus for manufacturing integrated circuit device
US11624556B2 (en) 2019-05-06 2023-04-11 Messer Industries Usa, Inc. Impurity control for a high pressure CO2 purification and supply system
JP2022115405A (en) * 2021-01-28 2022-08-09 株式会社Ｓｃｒｅｅｎホールディングス Determination method of completion of replacement, substrate processing method, and substrate processing device
CN115415224B (en) * 2022-09-01 2024-03-22 山西华青环保股份有限公司 Pressure-resistant and heat-resistant phosphoric acid method activated carbon pickling device

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH591286A5 (en) * 1975-04-22 1977-09-15 Escher Wyss Ag
US5368171A (en) * 1992-07-20 1994-11-29 Jackson; David P. Dense fluid microwave centrifuge
US5344493A (en) * 1992-07-20 1994-09-06 Jackson David P Cleaning process using microwave energy and centrifugation in combination with dense fluids
WO1996023606A1 (en) * 1995-02-01 1996-08-08 Jackson David P Dense fluid centrifugal separation process and apparatus
US6063292A (en) * 1997-07-18 2000-05-16 Baker Hughes Incorporated Method and apparatus for controlling vertical and horizontal basket centrifuges

Also Published As

Publication number Publication date
US20030205510A1 (en) 2003-11-06
US6802961B2 (en) 2004-10-12
WO2001068279A2 (en) 2001-09-20
WO2001068279A3 (en) 2002-03-21

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