AU2001243357A1 - Flexible membrane for tunable fabry-perot filter - Google Patents

Flexible membrane for tunable fabry-perot filter

Info

Publication number
AU2001243357A1
AU2001243357A1 AU2001243357A AU4335701A AU2001243357A1 AU 2001243357 A1 AU2001243357 A1 AU 2001243357A1 AU 2001243357 A AU2001243357 A AU 2001243357A AU 4335701 A AU4335701 A AU 4335701A AU 2001243357 A1 AU2001243357 A1 AU 2001243357A1
Authority
AU
Australia
Prior art keywords
flexible membrane
perot filter
tunable fabry
fabry
tunable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001243357A
Inventor
Dale C. Flanders
Michael F. Miller
Peter S. Whitney
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Axsun Technologies LLC
Original Assignee
Axsun Technologies LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Axsun Technologies LLC filed Critical Axsun Technologies LLC
Publication of AU2001243357A1 publication Critical patent/AU2001243357A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/185—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors with means for adjusting the shape of the mirror surface
    • G02B7/188—Membrane mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
AU2001243357A 2000-03-03 2001-03-01 Flexible membrane for tunable fabry-perot filter Abandoned AU2001243357A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US18678000P 2000-03-03 2000-03-03
US60186780 2000-03-03
US09648060 2000-08-25
US09/648,060 US6341039B1 (en) 2000-03-03 2000-08-25 Flexible membrane for tunable fabry-perot filter
PCT/US2001/006577 WO2001067171A2 (en) 2000-03-03 2001-03-01 Flexible membrane for tunable fabry-perot filter

Publications (1)

Publication Number Publication Date
AU2001243357A1 true AU2001243357A1 (en) 2001-09-17

Family

ID=26882402

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001243357A Abandoned AU2001243357A1 (en) 2000-03-03 2001-03-01 Flexible membrane for tunable fabry-perot filter

Country Status (3)

Country Link
US (1) US6341039B1 (en)
AU (1) AU2001243357A1 (en)
WO (1) WO2001067171A2 (en)

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US6941038B2 (en) * 2003-03-25 2005-09-06 Hon Hai Precision Ind. Co., Ltd. Tunable optical fiber with compression ring
US6996312B2 (en) 2003-04-29 2006-02-07 Rosemount, Inc. Tunable fabry-perot filter
US7447891B2 (en) * 2003-04-30 2008-11-04 Hewlett-Packard Development Company, L.P. Light modulator with concentric control-electrode structure
KR100489810B1 (en) * 2003-05-12 2005-05-17 한국전자통신연구원 Wavelength tunable filter capable of bi-directionally actuating by electromagnetic force
JP3812550B2 (en) * 2003-07-07 2006-08-23 セイコーエプソン株式会社 Tunable optical filter
JP2005055670A (en) * 2003-08-04 2005-03-03 Seiko Epson Corp Mems device, method of manufacturing the same, and mems module
JP3786106B2 (en) * 2003-08-11 2006-06-14 セイコーエプソン株式会社 Wavelength tunable optical filter and manufacturing method thereof
JP2005099206A (en) * 2003-09-22 2005-04-14 Seiko Epson Corp Variable wavelength filter and method for manufacturing the same
JP3770326B2 (en) * 2003-10-01 2006-04-26 セイコーエプソン株式会社 Analysis equipment
KR100533535B1 (en) * 2003-11-13 2005-12-06 한국전자통신연구원 Thermally actuated wavelength tunable optical filter
JP2005165067A (en) 2003-12-03 2005-06-23 Seiko Epson Corp Tunable optical filter and method of manufacturing tunable optical filter
KR100595999B1 (en) * 2003-12-22 2006-07-07 한국전자통신연구원 Wavelength tunable optical filter
CN100345015C (en) * 2003-12-30 2007-10-24 侯继东 Regulatable optical appliance based on micro electromechanical system technology
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US7733553B2 (en) * 2005-09-21 2010-06-08 Hewlett-Packard Development Company, L.P. Light modulator with tunable optical state
US7566582B2 (en) * 2005-10-25 2009-07-28 The Charles Stark Draper Laboratory, Inc. Systems, methods and devices relating to actuatably moveable machines
US20070090732A1 (en) * 2005-10-25 2007-04-26 The Charles Stark Draper Laboratory, Inc. Systems, methods and devices relating to actuatably moveable machines
US7361900B2 (en) * 2005-12-14 2008-04-22 Northrop Grumman Corporation “I” beam bridge interconnection for ultra-sensitive silicon sensor
WO2007103546A2 (en) * 2006-03-08 2007-09-13 Wispry, Inc. Micro-electro-mechanical system (mems) variable capacitors and actuation components and related methods
US20070211257A1 (en) * 2006-03-09 2007-09-13 Kearl Daniel A Fabry-Perot Interferometer Composite and Method
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US20080101748A1 (en) * 2006-10-26 2008-05-01 Hewlett-Packard Development Company Lp Mems device lever
US8503063B2 (en) 2008-12-30 2013-08-06 Sipix Imaging, Inc. Multicolor display architecture using enhanced dark state
US8797258B2 (en) 2008-12-30 2014-08-05 Sipix Imaging, Inc. Highlight color display architecture using enhanced dark state
US9025234B2 (en) 2009-01-22 2015-05-05 E Ink California, Llc Luminance enhancement structure with varying pitches
JP5530205B2 (en) * 2010-02-01 2014-06-25 日本オクラロ株式会社 Interferometer, demodulator and optical communication module
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WO2023215319A1 (en) * 2022-05-02 2023-11-09 Jun Zou Surface-micromachined fabry-pérot sensors and array

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Also Published As

Publication number Publication date
WO2001067171A3 (en) 2002-03-14
WO2001067171A2 (en) 2001-09-13
US6341039B1 (en) 2002-01-22

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