AU2001221530A1 - A highly stable micromachined capacitive transducer - Google Patents

A highly stable micromachined capacitive transducer

Info

Publication number
AU2001221530A1
AU2001221530A1 AU2001221530A AU2001221530A AU2001221530A1 AU 2001221530 A1 AU2001221530 A1 AU 2001221530A1 AU 2001221530 A AU2001221530 A AU 2001221530A AU 2001221530 A AU2001221530 A AU 2001221530A AU 2001221530 A1 AU2001221530 A1 AU 2001221530A1
Authority
AU
Australia
Prior art keywords
highly stable
capacitive transducer
micromachined capacitive
stable micromachined
transducer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001221530A
Inventor
Patrick Richard Scheeper
Torben Storgaard-Larsen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hottinger Bruel and Kjaer AS
Original Assignee
Bruel and Kjaer Sound and Vibration Measurement AS
Filing date
Publication date
Application filed by Bruel and Kjaer Sound and Vibration Measurement AS filed Critical Bruel and Kjaer Sound and Vibration Measurement AS
Publication of AU2001221530A1 publication Critical patent/AU2001221530A1/en
Abandoned legal-status Critical Current

Links

AU2001221530A 2000-12-22 A highly stable micromachined capacitive transducer Abandoned AU2001221530A1 (en)

Publications (1)

Publication Number Publication Date
AU2001221530A1 true AU2001221530A1 (en) 2002-07-08

Family

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