AU2000237498A1 - Prober interface plate - Google Patents

Prober interface plate

Info

Publication number
AU2000237498A1
AU2000237498A1 AU2000237498A AU3749800A AU2000237498A1 AU 2000237498 A1 AU2000237498 A1 AU 2000237498A1 AU 2000237498 A AU2000237498 A AU 2000237498A AU 3749800 A AU3749800 A AU 3749800A AU 2000237498 A1 AU2000237498 A1 AU 2000237498A1
Authority
AU
Australia
Prior art keywords
interface plate
prober interface
prober
plate
interface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2000237498A
Inventor
Thomas T. Montoya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Accretech USA Inc
Original Assignee
TSK America Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TSK America Inc filed Critical TSK America Inc
Publication of AU2000237498A1 publication Critical patent/AU2000237498A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2886Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)
AU2000237498A 2000-03-15 2000-03-15 Prober interface plate Abandoned AU2000237498A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US2000/006863 WO2001069274A1 (en) 2000-03-15 2000-03-15 Prober interface plate

Publications (1)

Publication Number Publication Date
AU2000237498A1 true AU2000237498A1 (en) 2001-09-24

Family

ID=21741156

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2000237498A Abandoned AU2000237498A1 (en) 2000-03-15 2000-03-15 Prober interface plate

Country Status (2)

Country Link
AU (1) AU2000237498A1 (en)
WO (1) WO2001069274A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7071714B2 (en) 2001-11-02 2006-07-04 Formfactor, Inc. Method and system for compensating for thermally induced motion of probe cards
US6972578B2 (en) 2001-11-02 2005-12-06 Formfactor, Inc. Method and system for compensating thermally induced motion of probe cards
US20160106390A1 (en) * 2013-06-07 2016-04-21 Guardsman Scientific, Inc. Systems and methods for securing a peripheral ultrasound device
CN110568336B (en) * 2019-08-30 2022-03-04 上海御渡半导体科技有限公司 Interface device and test equipment provided with same

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR0140034B1 (en) * 1993-12-16 1998-07-15 모리시다 요이치 Semiconductor wafer case, connection method and apparatus, and inspection method for semiconductor integrated circuit, probe card, and its manufacturing method
US5546012A (en) * 1994-04-15 1996-08-13 International Business Machines Corporation Probe card assembly having a ceramic probe card
US5729149A (en) * 1995-09-29 1998-03-17 Motorola, Inc. Apparatus for holding a testing substrate in a semiconductor wafer tester and method for using the same
US5656943A (en) * 1995-10-30 1997-08-12 Motorola, Inc. Apparatus for forming a test stack for semiconductor wafer probing and method for using the same

Also Published As

Publication number Publication date
WO2001069274A1 (en) 2001-09-20

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