AU1686870A - A method for reducing electromigration damage at metal interfaces - Google Patents

A method for reducing electromigration damage at metal interfaces

Info

Publication number
AU1686870A
AU1686870A AU16868/70A AU1686870A AU1686870A AU 1686870 A AU1686870 A AU 1686870A AU 16868/70 A AU16868/70 A AU 16868/70A AU 1686870 A AU1686870 A AU 1686870A AU 1686870 A AU1686870 A AU 1686870A
Authority
AU
Australia
Prior art keywords
metal interfaces
reducing electromigration
electromigration damage
damage
reducing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU16868/70A
Other languages
English (en)
Inventor
Rosenberg Robert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of AU1686870A publication Critical patent/AU1686870A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Pressure Welding/Diffusion-Bonding (AREA)
AU16868/70A 1969-06-30 1970-06-26 A method for reducing electromigration damage at metal interfaces Expired AU1686870A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US83777869A 1969-06-30 1969-06-30
USUS837778 1969-06-30

Publications (1)

Publication Number Publication Date
AU1686870A true AU1686870A (en) 1972-01-06

Family

ID=25275395

Family Applications (1)

Application Number Title Priority Date Filing Date
AU16868/70A Expired AU1686870A (en) 1969-06-30 1970-06-26 A method for reducing electromigration damage at metal interfaces

Country Status (6)

Country Link
JP (1) JPS493310B1 (enExample)
AU (1) AU1686870A (enExample)
CH (1) CH536557A (enExample)
DE (1) DE2031818A1 (enExample)
FR (1) FR2048036B1 (enExample)
GB (1) GB1312811A (enExample)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE637621A (enExample) * 1962-05-25 1900-01-01
US3241931A (en) * 1963-03-01 1966-03-22 Rca Corp Semiconductor devices

Also Published As

Publication number Publication date
FR2048036A1 (enExample) 1971-03-19
DE2031818A1 (de) 1971-01-14
JPS493310B1 (enExample) 1974-01-25
CH536557A (de) 1973-04-30
FR2048036B1 (enExample) 1974-10-31
GB1312811A (en) 1973-04-11

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