AU1597366A - Improved sputtering methods and apparatus - Google Patents

Improved sputtering methods and apparatus

Info

Publication number
AU1597366A
AU1597366A AU15973/66A AU1597366A AU1597366A AU 1597366 A AU1597366 A AU 1597366A AU 15973/66 A AU15973/66 A AU 15973/66A AU 1597366 A AU1597366 A AU 1597366A AU 1597366 A AU1597366 A AU 1597366A
Authority
AU
Australia
Prior art keywords
sputtering methods
improved sputtering
improved
methods
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU15973/66A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Industries Pty Ltd
Original Assignee
Philips Industries Pty Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Industries Pty Ltd filed Critical Philips Industries Pty Ltd
Priority to AU15973/66A priority Critical patent/AU1597366A/en
Publication of AU1597366A publication Critical patent/AU1597366A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
AU15973/66A 1967-12-28 1967-12-28 Improved sputtering methods and apparatus Expired AU1597366A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU15973/66A AU1597366A (en) 1967-12-28 1967-12-28 Improved sputtering methods and apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AU15973/66A AU1597366A (en) 1967-12-28 1967-12-28 Improved sputtering methods and apparatus

Publications (1)

Publication Number Publication Date
AU1597366A true AU1597366A (en) 1969-07-03

Family

ID=3705924

Family Applications (1)

Application Number Title Priority Date Filing Date
AU15973/66A Expired AU1597366A (en) 1967-12-28 1967-12-28 Improved sputtering methods and apparatus

Country Status (1)

Country Link
AU (1) AU1597366A (en)

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