AU140568B2 - Process of depositing silica films - Google Patents

Process of depositing silica films

Info

Publication number
AU140568B2
AU140568B2 AU14393/47A AU1439347A AU140568B2 AU 140568 B2 AU140568 B2 AU 140568B2 AU 14393/47 A AU14393/47 A AU 14393/47A AU 1439347 A AU1439347 A AU 1439347A AU 140568 B2 AU140568 B2 AU 140568B2
Authority
AU
Australia
Prior art keywords
silica films
depositing silica
depositing
films
silica
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU14393/47A
Other versions
AU1439347A (en
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of AU140568B2 publication Critical patent/AU140568B2/en
Publication of AU1439347A publication Critical patent/AU1439347A/en
Expired legal-status Critical Current

Links

AU14393/47A 1947-08-12 Process of depositing silica films Expired AU140568B2 (en)

Publications (2)

Publication Number Publication Date
AU140568B2 true AU140568B2 (en) 1947-09-11
AU1439347A AU1439347A (en) 1947-09-11

Family

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