ATE98813T1 - SEALED CAVITY SEMICONDUCTOR PRESSURE TRANSDUCER AND METHOD THEREOF. - Google Patents

SEALED CAVITY SEMICONDUCTOR PRESSURE TRANSDUCER AND METHOD THEREOF.

Info

Publication number
ATE98813T1
ATE98813T1 AT86903022T AT86903022T ATE98813T1 AT E98813 T1 ATE98813 T1 AT E98813T1 AT 86903022 T AT86903022 T AT 86903022T AT 86903022 T AT86903022 T AT 86903022T AT E98813 T1 ATE98813 T1 AT E98813T1
Authority
AT
Austria
Prior art keywords
pressure transducer
sealed cavity
semiconductor pressure
cavity semiconductor
sealed
Prior art date
Application number
AT86903022T
Other languages
German (de)
Inventor
Henry Guckel
David W Burns
Original Assignee
Wisconsin Alumni Res Found
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wisconsin Alumni Res Found filed Critical Wisconsin Alumni Res Found
Priority claimed from EP19860903022 external-priority patent/EP0219543B1/en
Application granted granted Critical
Publication of ATE98813T1 publication Critical patent/ATE98813T1/en

Links

AT86903022T 1985-04-26 1986-04-24 SEALED CAVITY SEMICONDUCTOR PRESSURE TRANSDUCER AND METHOD THEREOF. ATE98813T1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US72790985A 1985-04-26 1985-04-26
EP19860903022 EP0219543B1 (en) 1985-04-26 1986-04-24 Sealed cavity semiconductor pressure transducers and method
PCT/US1986/000860 WO1986006548A1 (en) 1985-04-26 1986-04-24 Sealed cavity semiconductor pressure transducers and method

Publications (1)

Publication Number Publication Date
ATE98813T1 true ATE98813T1 (en) 1994-01-15

Family

ID=26107129

Family Applications (1)

Application Number Title Priority Date Filing Date
AT86903022T ATE98813T1 (en) 1985-04-26 1986-04-24 SEALED CAVITY SEMICONDUCTOR PRESSURE TRANSDUCER AND METHOD THEREOF.

Country Status (1)

Country Link
AT (1) ATE98813T1 (en)

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Legal Events

Date Code Title Description
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