ATE93330T1 - Photodefizierbare dielektrika-zwischenschicht. - Google Patents

Photodefizierbare dielektrika-zwischenschicht.

Info

Publication number
ATE93330T1
ATE93330T1 AT89908070T AT89908070T ATE93330T1 AT E93330 T1 ATE93330 T1 AT E93330T1 AT 89908070 T AT89908070 T AT 89908070T AT 89908070 T AT89908070 T AT 89908070T AT E93330 T1 ATE93330 T1 AT E93330T1
Authority
AT
Austria
Prior art keywords
photodefectable
dielectric interlayer
interlayer
dielectric
photodefectable dielectric
Prior art date
Application number
AT89908070T
Other languages
English (en)
Inventor
Joseph J Zupancic
Original Assignee
Allied Signal Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US07/211,018 external-priority patent/US4908096A/en
Application filed by Allied Signal Inc filed Critical Allied Signal Inc
Application granted granted Critical
Publication of ATE93330T1 publication Critical patent/ATE93330T1/de

Links

AT89908070T 1988-06-24 1989-06-23 Photodefizierbare dielektrika-zwischenschicht. ATE93330T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US07/211,018 US4908096A (en) 1988-06-24 1988-06-24 Photodefinable interlevel dielectrics
PCT/US1989/002780 WO1989012846A1 (en) 1988-06-24 1989-06-23 Photodefinable interlevel dielectrics
EP89908070A EP0422110B1 (de) 1988-06-24 1989-06-23 Photodefizierbare dielektrika-zwischenschicht

Publications (1)

Publication Number Publication Date
ATE93330T1 true ATE93330T1 (de) 1993-09-15

Family

ID=27233116

Family Applications (1)

Application Number Title Priority Date Filing Date
AT89908070T ATE93330T1 (de) 1988-06-24 1989-06-23 Photodefizierbare dielektrika-zwischenschicht.

Country Status (1)

Country Link
AT (1) ATE93330T1 (de)

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee