ATE74290T1 - Gaseinlass fuer eine mehrzahl verschiedener reaktionsgase in reaktionsgefaesse. - Google Patents

Gaseinlass fuer eine mehrzahl verschiedener reaktionsgase in reaktionsgefaesse.

Info

Publication number
ATE74290T1
ATE74290T1 AT88905673T AT88905673T ATE74290T1 AT E74290 T1 ATE74290 T1 AT E74290T1 AT 88905673 T AT88905673 T AT 88905673T AT 88905673 T AT88905673 T AT 88905673T AT E74290 T1 ATE74290 T1 AT E74290T1
Authority
AT
Austria
Prior art keywords
gas inlet
reaction
gases
different
vessels
Prior art date
Application number
AT88905673T
Other languages
English (en)
Inventor
Holger Juergensen
Original Assignee
Aixtron Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19873721637 external-priority patent/DE3721637A1/de
Application filed by Aixtron Gmbh filed Critical Aixtron Gmbh
Application granted granted Critical
Publication of ATE74290T1 publication Critical patent/ATE74290T1/de

Links

AT88905673T 1987-06-30 1988-06-30 Gaseinlass fuer eine mehrzahl verschiedener reaktionsgase in reaktionsgefaesse. ATE74290T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19873721637 DE3721637A1 (de) 1987-06-30 1987-06-30 Gaseinlass fuer eine mehrzahl verschiedener reaktionsgase in reaktionsgefaesse
PCT/DE1988/000399 WO1989000080A1 (en) 1987-06-30 1988-06-30 Gas inlet for a plurality of various reaction gases in reaction vessels
EP88905673A EP0324811B1 (de) 1987-06-30 1988-06-30 Gaseinlass für eine mehrzahl verschiedener reaktionsgase in reaktionsgefässe

Publications (1)

Publication Number Publication Date
ATE74290T1 true ATE74290T1 (de) 1992-04-15

Family

ID=27196163

Family Applications (1)

Application Number Title Priority Date Filing Date
AT88905673T ATE74290T1 (de) 1987-06-30 1988-06-30 Gaseinlass fuer eine mehrzahl verschiedener reaktionsgase in reaktionsgefaesse.

Country Status (1)

Country Link
AT (1) ATE74290T1 (de)

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