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Priority claimed from JP58190761Aexternal-prioritypatent/JPS6083482A/ja
Priority claimed from JP59131699Aexternal-prioritypatent/JPS6110378A/ja
Application filed by Hitachi LtdfiledCriticalHitachi Ltd
Priority claimed from EP84111904Aexternal-prioritypatent/EP0138164B1/de
Application grantedgrantedCritical
Publication of ATE67058T1publicationCriticalpatent/ATE67058T1/de