ATE56564T1 - FILM FORMING PROCESS. - Google Patents

FILM FORMING PROCESS.

Info

Publication number
ATE56564T1
ATE56564T1 AT85901059T AT85901059T ATE56564T1 AT E56564 T1 ATE56564 T1 AT E56564T1 AT 85901059 T AT85901059 T AT 85901059T AT 85901059 T AT85901059 T AT 85901059T AT E56564 T1 ATE56564 T1 AT E56564T1
Authority
AT
Austria
Prior art keywords
film forming
forming process
film
forming
Prior art date
Application number
AT85901059T
Other languages
German (de)
Inventor
Yoshihisa Tawada
Kazunori Tsuge
Original Assignee
Kanegafuchi Chemical Ind
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP59029084A external-priority patent/JPH0719748B2/en
Application filed by Kanegafuchi Chemical Ind filed Critical Kanegafuchi Chemical Ind
Application granted granted Critical
Publication of ATE56564T1 publication Critical patent/ATE56564T1/en

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
AT85901059T 1984-02-17 1985-02-15 FILM FORMING PROCESS. ATE56564T1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP59029084A JPH0719748B2 (en) 1984-02-17 1984-02-17 Film forming equipment
PCT/JP1985/000064 WO1985003803A1 (en) 1984-02-17 1985-02-15 Film forming method and apparatus
EP85901059A EP0172916B1 (en) 1984-02-17 1985-02-15 Film forming method

Publications (1)

Publication Number Publication Date
ATE56564T1 true ATE56564T1 (en) 1990-09-15

Family

ID=26101153

Family Applications (1)

Application Number Title Priority Date Filing Date
AT85901059T ATE56564T1 (en) 1984-02-17 1985-02-15 FILM FORMING PROCESS.

Country Status (1)

Country Link
AT (1) ATE56564T1 (en)

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
RZN Patent revoked