ATE56308T1 - System und verfahren der maskierten ionenstrahllithographie. - Google Patents

System und verfahren der maskierten ionenstrahllithographie.

Info

Publication number
ATE56308T1
ATE56308T1 AT87901780T AT87901780T ATE56308T1 AT E56308 T1 ATE56308 T1 AT E56308T1 AT 87901780 T AT87901780 T AT 87901780T AT 87901780 T AT87901780 T AT 87901780T AT E56308 T1 ATE56308 T1 AT E56308T1
Authority
AT
Austria
Prior art keywords
ion beam
beam lithography
masked ion
masked
lithography
Prior art date
Application number
AT87901780T
Other languages
English (en)
Inventor
Charles M Mckenna
James E Wood
John L Bartelt
Ross D Olney
J William Ward
Charles W Slayman
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/837,127 external-priority patent/US4757208A/en
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Application granted granted Critical
Publication of ATE56308T1 publication Critical patent/ATE56308T1/de

Links

AT87901780T 1986-03-07 1987-01-27 System und verfahren der maskierten ionenstrahllithographie. ATE56308T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US06/837,127 US4757208A (en) 1986-03-07 1986-03-07 Masked ion beam lithography system and method
PCT/US1987/000106 WO1987005438A1 (en) 1986-03-07 1987-01-27 Masked ion beam lithography system and method
EP87901780A EP0258383B1 (de) 1986-03-07 1987-01-27 System und verfahren der maskierten ionenstrahllithographie

Publications (1)

Publication Number Publication Date
ATE56308T1 true ATE56308T1 (de) 1990-09-15

Family

ID=26113026

Family Applications (1)

Application Number Title Priority Date Filing Date
AT87901780T ATE56308T1 (de) 1986-03-07 1987-01-27 System und verfahren der maskierten ionenstrahllithographie.

Country Status (1)

Country Link
AT (1) ATE56308T1 (de)

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee