ATE552921T1 - Verfahren zur kontrollierten transienten kavitation - Google Patents

Verfahren zur kontrollierten transienten kavitation

Info

Publication number
ATE552921T1
ATE552921T1 AT05447214T AT05447214T ATE552921T1 AT E552921 T1 ATE552921 T1 AT E552921T1 AT 05447214 T AT05447214 T AT 05447214T AT 05447214 T AT05447214 T AT 05447214T AT E552921 T1 ATE552921 T1 AT E552921T1
Authority
AT
Austria
Prior art keywords
transient cavitation
creating
range
cavitation
acoustic field
Prior art date
Application number
AT05447214T
Other languages
English (en)
Inventor
Frank Holsteyns
Kuntack Lee
Original Assignee
Imec
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Imec, Samsung Electronics Co Ltd filed Critical Imec
Application granted granted Critical
Publication of ATE552921T1 publication Critical patent/ATE552921T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02—Cleaning by the force of jets or sprays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B2203/00—Details of cleaning machines or methods involving the use or presence of liquid or steam
    • B08B2203/02—Details of machines or methods for cleaning by the force of jets or sprays
    • B08B2203/0288—Ultra or megasonic jets

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Surgical Instruments (AREA)
AT05447214T 2004-09-21 2005-09-20 Verfahren zur kontrollierten transienten kavitation ATE552921T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US61208704P 2004-09-21 2004-09-21
EP04447204A EP1637238A1 (de) 2004-09-21 2004-09-21 Verfahren zur kontrollierten Kavitation

Publications (1)

Publication Number Publication Date
ATE552921T1 true ATE552921T1 (de) 2012-04-15

Family

ID=34933083

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05447214T ATE552921T1 (de) 2004-09-21 2005-09-20 Verfahren zur kontrollierten transienten kavitation

Country Status (3)

Country Link
EP (1) EP1637238A1 (de)
KR (1) KR100674996B1 (de)
AT (1) ATE552921T1 (de)

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2794438B2 (ja) * 1989-02-16 1998-09-03 本多電子株式会社 キャビテーションを利用した洗浄方法
DE4305660C2 (de) * 1993-02-24 1994-07-07 Stephan Mayer Vorrichtung und Verfahren zur Steuerung der Größenverteilungen von Gas- oder Flüssigkeitsblasen in einem flüssigen Medium
US5437729A (en) * 1993-04-08 1995-08-01 Martin Marietta Energy Systems, Inc. Controlled removal of ceramic surfaces with combination of ions implantation and ultrasonic energy
WO1996022844A1 (en) * 1995-01-27 1996-08-01 Trustees Of Boston University Acoustic coaxing methods and apparatus
US5800626A (en) * 1997-02-18 1998-09-01 International Business Machines Corporation Control of gas content in process liquids for improved megasonic cleaning of semiconductor wafers and microelectronics substrates
US5849091A (en) * 1997-06-02 1998-12-15 Micron Technology, Inc. Megasonic cleaning methods and apparatus
US5931173A (en) * 1997-06-09 1999-08-03 Cypress Semiconductor Corporation Monitoring cleaning effectiveness of a cleaning system
US5961895A (en) * 1997-06-19 1999-10-05 The United States Of America As Represented By The Secretary Of The Navy Multi-stage system for microbubble production

Also Published As

Publication number Publication date
KR20060051502A (ko) 2006-05-19
KR100674996B1 (ko) 2007-01-29
EP1637238A1 (de) 2006-03-22

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